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Jens Janssen Diploma Thesis - Prof. Dr. Norbert Wermes ...

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Chapter 6Sensor Characterization6.1 IntroductionThe di erent sensor types used for laboratory characterization are listed intable 6.1. The first sensor (3631-303, hereinafter referred to as “ATLAS”) is ofn + -on-n-type and is used as a reference sensor. This sensor is taken from thesame batch of wafers that was previously used to assemble the ATLAS pixeldetector. Two other planar sensors (WR13 and W11) were fabricated by CiS 1 .Both sensors are of n + -on-p-type. All planar sensors are solder bump bonded tothe FE-I3 by IZM 2 . The W11 sensor is mistakenly mounted rotated by 180°. Twomore sensors (2EM6 and 4EM9) were contributed by FBK 3 . The sensors makeuse of 3D technology with n + -electrodes in p-bulk (2 and 4 electrodes per pixelcell, respectively), and are indium bump bonded to the FE-I3 pixel readout chipby SELEX 4 . They were irradiated with 25 MeV protons to a calculated fluenceof 1 ◊ 10 15 n eq /cm 2 at the Karlsruhe Irradiation Center 5 in April 2009. Only alimited amount of data is available that was taken before the irradiation so thatit could not be used for data analysis.Company/Institute Sensor Technology Type FE-I3 Thickness FluenceCiS 3631-303 “ATLAS” planar n + -on-n 5-7A 256 ± 10 µm unirradiatedCiS W11 19GR-2 planar n + -on-p 8-13B 300 ± 10 µm unirradiatedCiS WR13 19GR-NM2 planar n + -on-p 8-10A 300 ± 10 µm unirradiatedFBK 2EM6 3D, 2 electrodes n + -in-p n/a 200 ± 10 µm 1 ◊ 10 15 neq/cm 2FBK 4EM9 3D, 4 electrodes n + -in-p n/a 200 ± 10 µm 1 ◊ 10 15 neq/cm 2Table 6.1: Comparison between the di erent sensor types that were investigatedduring the laboratory characterization. All sensors types are, among types fromother companies, candidates for the ATLAS IBL pixel detector upgrade.1 Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, Konrad-Zuse-Straße 14,D-99099 Erfurt, Germany.2 Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration, Gustav-Meyer-Allee 25,D-13355 Berlin, Germany.3 Fondazione Bruno Kessler, Via Santa Croce 77, I-38122 Trento, Italy.4 Sistemi Integrati S.p.A., Via Tiburtina 12, I-00131 Rome, Italy.5 Karlsruher Institut für Technologie, Institut für Experimentelle Kernphysik, CampusNord, PO Box 36 40, D-76021 Karlsruhe, Germany.65

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