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MPhil thesis of Lo Chi Wa - Department of Electronic & Computer ...

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Inductor layoutThe inductors used are double-layer (Metal 3 and Metal 2) circular spiral inductors. Forthe same inductance, circular spiral inductor has approximately pi/4 serial resistanceand parasitic capacitance <strong>of</strong> a square spiral inductor. The smaller serial resistance (orlarger quality factor) and parasitic capacitance can provide better phase noiseperformance and larger available tuning range <strong>of</strong> the voltage-controlled oscillator. Ourprevious trials show that single-layer and double-layer spiral inductors have a similarquality factor and parasitic capacitance. However, double-layer spiral inductor occupiesabout 1/4 area.The diameter <strong>of</strong> the spiral inductor is 280um with a hollow hole <strong>of</strong> 75um diameter. Thespacing between spirals is minimal, 1.8um. Since the sheet resistances <strong>of</strong> the two metallayers are different (0.05ohm for Metal 3 and 0.07ohm for Metal 2), the widths andnumbers <strong>of</strong> turns <strong>of</strong> the spirals <strong>of</strong> two layers are designed to be different to maintain thesame resistance per unit length, as shown in Fig. 90 and Fig. 91. In this case, the wholeresistance will not dominate by the spiral on the layer <strong>of</strong> higher resistance. The width <strong>of</strong>the spirals in Metal 2 and Metal 3 layers are 36um and 26um while the number <strong>of</strong> turnsare 2.5 and 3.5. These can keep the two spirals with the same resistance per length, thesame diameter and the same hollow hole size, as shown in Fig. 92. As the two spiralsoverlap and connect at the most inner turn, the two spirals share the resistance there.The same resistance per unit length can be still maintained even if the width <strong>of</strong> the innerturn <strong>of</strong> two spirals reduces. This special connection, as shown in Fig. 93, can maximizethe size <strong>of</strong> the hollow hole to improve the quality factor and reduce the parasiticcapacitance.94

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