PCT/2001/21 : PCT Gazette, Weekly Issue No. 21, 2001 - WIPO

21/2001
25 May/mai 2001 PCT Gazette - Section I - Gazette du PCT 8823
Wilmington, DE 19803 (US). ZUMSTEG,
Fredrick, Claus, Jr. [US/US]; 2715 Silverside
Road, Wilmington, DE 19810 (US).
(74) SIEGELL, Barbara, C.; E. I. Du Pont de
Nemours and Company, Legal Patent Records
Center, 1007 Market Street, Wilmington, DE
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(81) CN JP KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 G03F 7/00, B81C 1/00, H01F 41/04
(11) WO 01/37045 (13) A1
(21) PCT/EP00/11447
(22) 17 Nov/nov 2000 (17.11.2000)
(25) de (26) de
(30) 199 55 975.9 19 Nov/nov 1999 DE
(19.11.1999)
(43) 25 May/mai 2001 (25.05.2001)
(54) FLAT COIL AND LITHOGRAPHIC
METHOD FOR PRODUCING MICRO-
COMPONENTS
BOBINE PLATE ET PROCEDE LITHO-
GRAPHIQUE POUR PRODUIRE DES
MICROCOMPOSANTS
(71) INSTITUT FÜR MIKROTECHNIK
MAINZ GMBH [DE/DE]; Carl-Zeiss-
Strasse 18-20, 55129 Mainz (DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) SCHMITZ, Felix [DE/DE]; Gartenfeldplatz
8, 55118 Mainz (DE). NIENHAUS,
Matthias [DE/DE]; St.-Sebastian-Strasse 6,
55128 Mainz (DE). LACHER, Manfred
[DE/DE]; Kästrich 53, 55116 Mainz (DE).
(74) FUCHS, Jürgen, H. et al. / etc.; Abraham-
Lincoln-Strasse 7, 65189 Wiesbaden (DE).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CR CU CZ DK DM DZ
EE ES FI GB GD GE GH GM HR HU ID IL
IN IS JP KE KG KP KR KZ LC LK LR LS
LT LU LV MA MD MG MK MN MW MX
MZ NO NZ PL PT RO RU SD SE SG SI SK
SL TJ TM TR TT TZ UA UG US UZ VN YU
ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
Published / Publiée :(c)
(51) 7 G03F 7/00, H01L 21/312
(11) WO 01/37046
(21) PCT/RU00/00462
(13) A1
(22) 13 Nov/nov 2000 (13.11.2000)
(25) ru (26) ru
(30) 99 123936 15 Nov/nov 1999
(15.11.1999)
RU
(30) 99 123937 15 Nov/nov 1999
(15.11.1999)
RU
(43) 25 May/mai 2001 (25.05.2001)
(54) METHOD FOR FORMING A RELIEF
ON THE SURFACE OF A FUNCTIONAL
LAYER
PROCEDE DE FORMATION D’UN RE-
LIEF A LA SURFACE D’UNE COUCHE
FONCTIONNELLE
(71, 72) RAKHOVSKY, Vadim Izrailovich
[RU/RU]; B.Konjushkovsky per., 27a-17,
Moscow, 123242 (RU).
(74) OBSCHESTVO S OGRANICHENNOI
OTVETSTVENNOSTIJU "ANTEKH";
Kazarmenny per.,
(RU).
(81) CA DE JP US.
6-1, Moscow, 109028
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 G03F 7/004
(11) WO 01/37047 (13) A2
(21) PCT/US00/31136
(22) 14 Nov/nov 2000 (14.11.2000)
(25) en (26) en
(30) 60/166,035 17 Nov/nov 1999 US
(17.11.1999)
(43) 25 May/mai 2001 (25.05.2001)
(54) NITRILE/FLUOROALCOHOL-CON-
TAINING PHOTORESISTS AND AS-
SOCIATED PROCESSES FOR MI-
CROLITHOGRAPHY
PHOTORESISTS A BASE DE NI-
TRILE/FLUOROALCOOL ET PRO-
CEDES DE MICROLITHOGRAPHIE
ASSOCIES
(71) E.I. DU PONT DE NEMOURS AND
COMPANY [US/US]; 1007 Market Street,
Wilmington, DE 19898 (US).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) FRYD, Michael [US/US]; 50 East
Maple Avenue, Moorestown, NJ 08057 (US).
SCHADT, Frank, Leonard, III [US/US];
2407 Delaware Avenue, Wilmington, DE
19806 (US). PERIYASAMY, Mookkan
[US/US]; 2623 Pennington Drive, Wilmington,
DE 19806 (US).
(74) SINNOTT, Jessica, M.; E.I. Du Pont de
Nemours and Company, Legal Patent Records
Center, 1007 Market Street, Wilmington, DE
19898 (US).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CR CU CZ DE DK DM
DZ EE ES FI GB GD GE GH GM HR HU
ID IL IN IS JP KE KG KP KR KZ LC LK
LR LS LT LU LV MA MD MG MK MN MW
MX MZ NO NZ PL PT RO RU SD SE SG SI
SK SL TJ TM TR TT TZ UA UG US UZ VN
YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 G03F 7/027, 7/035, C08G 18/80
(11) WO 01/37048 (13) A1
(21) PCT/JP00/08026
(22) 14 Nov/nov 2000 (14.11.2000)
(25) ja (26) ja
(30) 11/325298 16 Nov/nov 1999
(16.11.1999)
(43) 25 May/mai 2001 (25.05.2001)
JP
(54) PHOTOSENSITIVE COMPOSITION
AND PRODUCTS OF CURING
THEREOF
COMPOSITION PHOTOSENSIBLE ET
PRODUITS POUR LA DURCIR
(71) MITSUBISHI CHEMICAL CORPORA-
TION [JP/JP]; 5-2, Marunouchi 2-chome,
Chiyoda-ku, Tokyo 100-0005 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) KUSAKA, Hisashi [JP/JP]; c/o Mitsubishi
Chemical Corporation Yokkaichi
Plant, 1, Toho-cho, Yokkaichi-shi, Mie
510-0848 (JP). HATA, Kazuyuki [JP/JP];
c/o Mitsubishi Chemical Corporation
Yokkaichi Plant, 1, Toho-cho, Yokkaichi-shi,
Mie 510-0848 (JP). SOEJIMA, Yuuji
[JP/JP]; c/o Mitsubishi Chemical Corporation,
Yokohama Research Center, 1000,
Kamoshida-cho, Aoba-ku, Yokohama-shi,
Kanagawa 227-0033 (JP).
(74) OGURI, Shohei et al. / etc.; Eikoh Patent
Office, Ark Mori Building, 28th Floor,
12-32, Akasaka 1-chome, Minato-ku, Tokyo
107-6028 (JP).
(81) CN KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 G03F 7/075, C08L 83/07, C08G 77/20,
G02B 6/12, C08J 7/18, G02B 5/18, 1/04
(11) WO 01/37049 (13) A1
(21) PCT/JP00/07949
(22) 10 Nov/nov 2000 (10.11.2000)
(25) ja (26) ja
(30) 11/323005 12 Nov/nov 1999 JP
(12.11.1999)
(43) 25 May/mai 2001 (25.05.2001)
(54) PHOTOSENSITIVE COMPOSITION,
AND OPTICAL WAVEGUIDE ELE-
MENT AND PROCESS FOR PRODUC-
ING THE SAME
COMPOSITION PHOTOSENSIBLE,
ELEMENT A GUIDE D’ONDE OP-
TIQUE ET PROCEDE DE PRODUC-
TION DUDIT ELEMENT
(71) NIPPON SHEET GLASS CO., LTD.
[JP/JP]; 5-11, Doshomachi 3-chome,
Chuo-ku, Osaka-shi, Osaka 541-0045 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) NAKAMURA, Koichiro [JP/JP]; Nippon
Sheet Glass Co., Ltd., 5-11, Doshomachi
3-chome, Chuo-ku, Osaka-shi, Osaka
541-0045 (JP).
(74) OHSHIMA, Masataka; Ohshima Patent Office,
Fukuya Building, 3, Yotsuya 4-chome,
Shinjuku-ku, Tokyo 160-0004 (JP).
(81) CA CN JP US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 G03F 7/11, 7/038, H01L 21/768
(11) WO 01/37050 (13) A1
(21) PCT/EP00/11448
(22) 17 Nov/nov 2000 (17.11.2000)
(25) de (26) de
(30) 199 55 969.4 19 Nov/nov 1999
(19.11.1999)
DE