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Cap 11 Fotoresisit Uno e Due Fotoni - Scienza dei Materiali

Cap 11 Fotoresisit Uno e Due Fotoni - Scienza dei Materiali

Cap 11 Fotoresisit Uno e Due Fotoni - Scienza dei Materiali

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Microstrutture ottenute da negative tone photoresists<br />

2 µm<br />

35<br />

Satoshi Kawata and co-workers of Osaka University (S Kawata et al 2001 Nature 412 697).<br />

Pho.B.O.S.

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