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Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...

Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...

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CONTENTS<br />

Chapter 1: INTRODUCTION 1<br />

Chapter 2: OVERVIEW OF CRYSTAL DEFECTS IN β-SIC 3<br />

Page<br />

2.1. Introduction 3<br />

2.2. Cubic and Z<strong>in</strong>c-Blende Crystal Structures 3<br />

2.2.1. The Face-Centred Cubic Structure 3<br />

2.2.2. The Z<strong>in</strong>c-Blende Structure 5<br />

2.3. Po<strong>in</strong>t Defects, Defect Migration and Anneal<strong>in</strong>g Behaviour 7<br />

2.3.1. Introduction 7<br />

2.3.2. Po<strong>in</strong>t Defects 7<br />

2.3.3. Defect Migration and Anneal<strong>in</strong>g Behaviour 8<br />

2.4. Dislocations 10<br />

2.4.1. Introduction 10<br />

2.4.2. The Dislocation L<strong>in</strong>e and Burgers Vector 11<br />

2.4.3. Motion <strong>of</strong> Dislocations 13<br />

2.5. Partial Dislocations and Slip 15<br />

2.6. Dislocations <strong>in</strong> <strong>the</strong> Z<strong>in</strong>c-Blende Structure 16<br />

2.7. Stack<strong>in</strong>g Faults 18<br />

2.8. Tw<strong>in</strong>n<strong>in</strong>g 21<br />

2.9. Vacancy and Interstitial Loops 22<br />

Chapter 3: ION IMPLANTATION AND RADIATION DAMAGE 24<br />

3.1. Introduction 24<br />

3.2. Ion Ranges 24<br />

3.2.1. Introduction 24<br />

3.2.2. Range Calculations 25<br />

3.2.3. The L<strong>in</strong>hard, Scharff and Schiott (LSS) Theory 26<br />

3.3. Defects Created by Ion Implantation 30<br />

3.3.1. Introduction 30<br />

3.3.2. Theory <strong>of</strong> Displacement Damage 30<br />

3.3.3. Defects 34<br />

3.3.3.1. Defects Created Dur<strong>in</strong>g Irradiation 34<br />

3.3.3.2. Aggregation <strong>of</strong> Po<strong>in</strong>t Defects and Growth <strong>of</strong> Defect 34<br />

Clusters dur<strong>in</strong>g Heat Treatment<br />

Chapter 4: DYNAMICAL THEORY OF ELECTRON DIFFRACTION 36<br />

AND IMAGE SIMULATION<br />

4.1. Introduction 36<br />

4.2. Theory <strong>of</strong> Electron Diffraction 36<br />

4.2.1. The Direct Space Bragg Equation 36<br />

4.2.2. The Bragg Equation <strong>in</strong> Reciprocal Space 38<br />

4.2.3. Darw<strong>in</strong>-Howie-Whelan Equations 40<br />

4.2.4. DHW Equations: Two-Beam Case 42

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