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Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...

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33<br />

where A is <strong>the</strong> atomic weight. Thus <strong>in</strong> general it is found that <strong>the</strong> number <strong>of</strong> atoms<br />

displaced by an <strong>in</strong>com<strong>in</strong>g ion Nd depends firstly on its energy. If its energy is less than<br />

LC <strong>the</strong> number <strong>of</strong> displaced atoms is determ<strong>in</strong>ed as follows. Consider an atom with<br />

<strong>in</strong>itial energy T < LC mov<strong>in</strong>g <strong>in</strong> a solid. The first collision <strong>the</strong>n results <strong>in</strong> a shar<strong>in</strong>g <strong>of</strong><br />

<strong>the</strong> energy T with <strong>the</strong> struck atom which on average is half that <strong>of</strong> T. Both atoms will<br />

<strong>the</strong>n cont<strong>in</strong>ue with energy 1/2T and collide with one atom each shar<strong>in</strong>g <strong>the</strong>ir energy<br />

with <strong>the</strong> struck atom with a factor <strong>of</strong> an half on average. This process will cont<strong>in</strong>ue<br />

until <strong>the</strong> average energy <strong>of</strong> <strong>the</strong> struck atoms falls below 2Ed and if this occurs after q<br />

groups <strong>of</strong> collisions <strong>the</strong> total amount <strong>of</strong> displaced atoms will be given by,<br />

q<br />

N d 2 ( T 2Ed<br />

)<br />

(3.25)<br />

This expression is valid if T is greater than 2Ed, if T is between Ed and 2Ed only one<br />

atom is displaced and below Ed obviously no atom is displaced. If T is bigger than LC<br />

<strong>the</strong> expression becomes LC/2Ed.<br />

If <strong>the</strong> energy <strong>of</strong> <strong>the</strong> atom is bigger than LC and LB K<strong>in</strong>ch<strong>in</strong> and Pease showed that <strong>the</strong><br />

mov<strong>in</strong>g atom will displace ΔN atoms <strong>in</strong> los<strong>in</strong>g energy ΔE, where<br />

N P E<br />

E<br />

(3.26)<br />

and P is given by,<br />

d<br />

meZ<br />

1[<br />

1<br />

ln( E 2Ed<br />

]<br />

P (3.27)<br />

2<br />

4M<br />

( Z / Z)<br />

ln( 4m<br />

E / M I )<br />

1<br />

effective<br />

4M<br />

M<br />

1 2<br />

with <br />

and 2<br />

2<br />

( M 1 M 2 )<br />

ion is light <strong>the</strong> expression may be simplified to,<br />

N<br />

d<br />

P E LC<br />

) bL<br />

<br />

Ed<br />

<br />

<br />

<br />

e<br />

2<br />

I 8. 8Z<br />

<strong>the</strong> mean ionization potential. If <strong>the</strong> implanted<br />

( 0 C<br />

(3.28)

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