Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...
Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...
Analysis of the extended defects in 3C-SiC.pdf - Nelson Mandela ...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
33<br />
where A is <strong>the</strong> atomic weight. Thus <strong>in</strong> general it is found that <strong>the</strong> number <strong>of</strong> atoms<br />
displaced by an <strong>in</strong>com<strong>in</strong>g ion Nd depends firstly on its energy. If its energy is less than<br />
LC <strong>the</strong> number <strong>of</strong> displaced atoms is determ<strong>in</strong>ed as follows. Consider an atom with<br />
<strong>in</strong>itial energy T < LC mov<strong>in</strong>g <strong>in</strong> a solid. The first collision <strong>the</strong>n results <strong>in</strong> a shar<strong>in</strong>g <strong>of</strong><br />
<strong>the</strong> energy T with <strong>the</strong> struck atom which on average is half that <strong>of</strong> T. Both atoms will<br />
<strong>the</strong>n cont<strong>in</strong>ue with energy 1/2T and collide with one atom each shar<strong>in</strong>g <strong>the</strong>ir energy<br />
with <strong>the</strong> struck atom with a factor <strong>of</strong> an half on average. This process will cont<strong>in</strong>ue<br />
until <strong>the</strong> average energy <strong>of</strong> <strong>the</strong> struck atoms falls below 2Ed and if this occurs after q<br />
groups <strong>of</strong> collisions <strong>the</strong> total amount <strong>of</strong> displaced atoms will be given by,<br />
q<br />
N d 2 ( T 2Ed<br />
)<br />
(3.25)<br />
This expression is valid if T is greater than 2Ed, if T is between Ed and 2Ed only one<br />
atom is displaced and below Ed obviously no atom is displaced. If T is bigger than LC<br />
<strong>the</strong> expression becomes LC/2Ed.<br />
If <strong>the</strong> energy <strong>of</strong> <strong>the</strong> atom is bigger than LC and LB K<strong>in</strong>ch<strong>in</strong> and Pease showed that <strong>the</strong><br />
mov<strong>in</strong>g atom will displace ΔN atoms <strong>in</strong> los<strong>in</strong>g energy ΔE, where<br />
N P E<br />
E<br />
(3.26)<br />
and P is given by,<br />
d<br />
meZ<br />
1[<br />
1<br />
ln( E 2Ed<br />
]<br />
P (3.27)<br />
2<br />
4M<br />
( Z / Z)<br />
ln( 4m<br />
E / M I )<br />
1<br />
effective<br />
4M<br />
M<br />
1 2<br />
with <br />
and 2<br />
2<br />
( M 1 M 2 )<br />
ion is light <strong>the</strong> expression may be simplified to,<br />
N<br />
d<br />
P E LC<br />
) bL<br />
<br />
Ed<br />
<br />
<br />
<br />
e<br />
2<br />
I 8. 8Z<br />
<strong>the</strong> mean ionization potential. If <strong>the</strong> implanted<br />
( 0 C<br />
(3.28)