Complete Report - University of New South Wales
Complete Report - University of New South Wales
Complete Report - University of New South Wales
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Surprisingly high sensitivity <strong>of</strong> PL lifetime measurements<br />
Using PL as a sensitive technique to determine small excess carrier concentrations in silicon<br />
may at fi rst sight appear diffi cult given silicon’s indirect band structure and the resulting low<br />
radiative recombination coeffi cient. However, the automated signal averaging, the geometry<br />
<strong>of</strong> our PL setup and the use <strong>of</strong> a home built, low noise, high gain preamplifi er allowed effective<br />
lifetimes to be determined down to injection levels < 10 9 cm -3 in 1 Ωcm p-type wafers (see<br />
Fig. 4.6.6.5) with data acquisition times <strong>of</strong> only a few seconds [4.6.1], which is orders <strong>of</strong><br />
magnitude below the detection limit <strong>of</strong> a QSS-PC set-up used at our Centre. Using that QSS-<br />
PC set-up, lifetime measurements become extremely noisy and inaccurate at injection levels<br />
< 10 13 cm -3 . Due to this somewhat unexpected sensitivity, PL lifetime measurements can<br />
also be used to determine very low effective lifetimes in quasi steady state mode and are by<br />
no means restricted to high quality fl oat zone silicon.<br />
The development <strong>of</strong> a computer controlled solid state light source for lifetime measurements<br />
has also improved the sensitivity and accuracy <strong>of</strong> PC measurements, because the same<br />
averaging techniques as used for PL can also be applied to PC measurements. While these<br />
improvements render PC measurements at low injection levels less noisy they cannot avoid<br />
some more fundamental limitations <strong>of</strong> PC measurements to be discussed now.<br />
Depletion region modulation effect<br />
In QSS-PC measurements at low to moderate injection conditions, the so-called depletion<br />
region modulation (DRM) effect leads to a sharp artifi cial increase <strong>of</strong> the apparent minority<br />
carrier lifetime on samples with a diffused or induced junction. Similar effects are expected<br />
in any other experimental technique in which the measured signal is determined by the sum<br />
<strong>of</strong> the minority and majority carrier concentrations. In contrast, theoretical analysis shows<br />
that QSS-PL measurements should be largely unaffected by the DRM effect [4.6.2]. This was<br />
proven experimentally by investigation <strong>of</strong> two 1Ωcm p-type wafers, one with Phosphorous<br />
diffusions the other one with Boron diffusions on both sides [4.6.1]. Theoretically the artefacts<br />
due to the DRM effect are expected only for the Phosphorus-diffused sample. Fig.4.6.6.4<br />
shows the lifetimes <strong>of</strong> the Boron diffused sample determined from PC and from PL. Very good<br />
agreement is observed between PL and PC with no indication in both measurements <strong>of</strong> an<br />
infl uence <strong>of</strong> the DRM effect. In contrast, the PC lifetime from the Phosphorus doped sample<br />
shown in Fig.4.6.6.5 increases steeply at injection levels < 5x10 12 cm -3 (up to an apparent<br />
lifetime <strong>of</strong> 13ms, not shown in Fig.4.6.6.5). This increase is consistent with the theoretically<br />
predicted effects resulting from the DRM effect. As theoretically predicted, the PL lifetime is<br />
unaffected by these effects.<br />
Figure 4.6.6.4: Effective lifetime from<br />
QSS-PL (red) and from QSS-PC (black)<br />
for a 1Ωcm p-type wafer with Boron<br />
diffusions on both sides. Very good<br />
agreement is observed between the<br />
lifetimes from PL and from PC over a<br />
wide injection level range.<br />
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