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Complete Report - University of New South Wales

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Solar Cell Design<br />

PL was used to characterize a new method <strong>of</strong> edge isolation for our n-type cells that involves<br />

a laser formed isolation trench through the emitter and around the solar cell’s edge. Several<br />

test wafers were prepared, half including the new edge isolation technique and the other<br />

half employing the traditional technique <strong>of</strong> laser-cleaving the edge. Figure 4.3.2.16 shows<br />

the results <strong>of</strong> Suns-PL and PL imaging used to analyze the effectiveness <strong>of</strong> the edge isolation<br />

technique. The image in Figure 4.3.2.16a shows the sample in high injection, revealing where,<br />

in order to create a recombination active area, we have deliberately scratched the surface<br />

outside the isolation trench with a diamond pen. Figure 4.3.2.16b shows the same sample in<br />

lower injection, demonstrating the effectiveness <strong>of</strong> the new process in providing isolation <strong>of</strong><br />

the main solar cell area from the edges and scratches.<br />

Figure 4.3.2.16: Photoluminescence images <strong>of</strong><br />

1 Ωcm, 240µm thick, n-type wafers with phosphorus<br />

diffusion on the rear side and boron diffusion on<br />

the front side with isolation trench after various<br />

processing steps: a) at ~ 1 Sun ; b) ~ 0.1 Suns<br />

Figure 4.3.2.17 shows the pseudo dark IV and dark local ideality factor <strong>of</strong><br />

the samples shown in Figure 4.3.2.16. The curves were generated using the<br />

Suns-PL technique. All <strong>of</strong> the curves labeled a) have the new trench isolation<br />

technique applied. These curves compare to the non-isolated cases b), c)<br />

and d) in which the effect <strong>of</strong> edge enhanced junction recombination and edge<br />

shunting are apparent. In this case, PL techniques provided almost immediate<br />

feedback in assessing the effectiveness <strong>of</strong> the new edge isolation process.<br />

Figure 4.3.2.17: (top) Pseudo dark I-V curves obtained from QSS-PL<br />

measurements on a 1 Ωcm, 240µm thick, n-type wafer with phosphorus<br />

diffusion on the rear side and boron diffusion on the front side after various<br />

processing steps (see text for details); (bottom) corresponding local ideality<br />

factor.<br />

Silicon Nitride – Wafer Handling and Preparation<br />

PL imaging is particularly powerful for developing silicon nitride as a passivation layer because,<br />

unlike thermal oxide fi lms, silicon nitride fi lms show a rich variety <strong>of</strong> spatially resolved effects,<br />

even in samples with exceptional quality passivation layers.<br />

In 2005, we investigated the application <strong>of</strong> PL imaging to the development <strong>of</strong> improved quality<br />

silicon nitride fi lms. We found that PL imaging can be used to understand the deposition<br />

process, to identify and address key manual handling issues, to characterize thermal annealing<br />

processes, and to study the effect <strong>of</strong> post-deposition chemical processing.<br />

PL imaging can be used to help identify how sample handling can affect the passivation<br />

quality <strong>of</strong> the SiN fi lms. Figure 4.3.2.18 shows a few PL images that highlight handling related<br />

issues.<br />

45

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