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Stress-Optical Effects in a<br />

Silica-on-Silicon Waveguide<br />

Introduction<br />

Planar photonic waveguides in silica (SiO 2 ) have great potential for use in wavelength<br />

routing applications. The major problem with these kinds of waveguides is<br />

birefringence. Anisotropic refractive indices result in fundamental mode splitting and<br />

pulse broadening. The goal is to minimize birefringence effects by adapting materials<br />

and manufacturing processes. One source of birefringence is the use of a silicon (Si)<br />

wafer on which the waveguide structure is deposited. After annealing at high<br />

temperature (approximately 1000 °C), mismatch in thermal expansivity between the<br />

silica and silicon layers results in thermally induced stresses in the structure at the<br />

operating temperature (typically room temperature, 20 °C).<br />

Air<br />

Cladding (Silica)<br />

Buffer (Silica)<br />

The Stress-Optical Effect and Plane Strain<br />

The general linear stress-optical relation can be written, using tensor notation, as<br />

where ∆n ij = n ij − n 0 I ij , n ij is the refractive index tensor, n 0 is the refractive index for<br />

a stress-free material, I ij is the identity tensor, B ijkl is the stress-optical tensor, and σ kl<br />

is the stress tensor. Due to symmetry the number of independent parameters in the<br />

stress-optical tensor that characterizes this constitutive relation can be reduced.<br />

Because n ij and σ kl are both symmetric, B ijkl = B jikl and B ijkl = B ijlk. In many cases it<br />

is possible to further reduce the number of independent parameters, and this model<br />

260 | CHAPTER 4: OPTICS AND PHOTONICS MODELS<br />

Silicon Wafer Core<br />

Optical Computation Domain Boundary<br />

∆n ij<br />

=<br />

– Bijklσkl

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