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Name (Title):
S. Higuchi (NIMS Visiting Researcher)
H. Kuramochi, Y. Shingaya and T. Nakayama
Affiliation:
International Center for Materials Nanoarchitectonics
(MANA), NIMS
Address:
1-1 Namiki, Tsukuba. Ibaraki 305-0044, Japan
Email: higuchi.seiji@nims.go.jp
Home Page:
Presentation Title:
Development of multiple-scanning-probe force microscope
Abstract:
In order to meet the increasing demands of measuring the physical properties (electrical,
optical, magnetic, etc.) of nanoscale objects, multiple-scanning-probe microscopes (MPSPMs)
are one of the adequate tools. Taking into consideration the possibility of measuring organic and
bio materials, we have developed multiple-scanning-probe tunneling microscope (MPSTM)
working in the air with original control software and electronics [1] . Not every nanoscale objects
(nanostructures, nanodevices, etc.) are conductive, and not every substrate for the nanomaterials
are conductive, hence, equipping with the feature of force microscopy is preferable for
nanometrology. Consequently, by adopting quartz tuning fork sensors (TF) to the MPSTM
system, the multiple-scanning-probe force microscope (MPSFM) is realized without mechanical
change nor optical heads. TF with very short tip has been used as a self-sensing probe [2] in single
probe STM/AFM system. Most commonly, a short tip (< 1 mm) is attached on a prong of the TF
perpendicularly or in alignment. However for the MPSPM system, some modifications are
needed to move the tips closer to each other in nm order. We therefore optimize the length and
angle of tips attached on the TF for MPSFM first. The parallel AFM operation with fine
positioning using optimized TF probes will be discussed.
References:
[1] S.Higuchi, et,al., IEEJ Trans. EIS,Vol.127, No.9, 2007 1314
[2] F.J.Giessible, Appl. Phys. Lett., Vol. 76 (2000) 1470.
76
Amplitude [abs.]
0.8
0.6
0.4
0.2
5mm
4mm
3mm
0
10000 20000 30000
Frequency [Hz]
Fig. 1 Example of a resonance curve
of optimized TF probes
Fig. 2 Optical microscope image of
four TF probes in close-set placement
Poster Session PS-6