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Name (Title):<br />
Tohru Tsuruoka (MANA Scientist)<br />
Affiliation:<br />
International Center for Materials Nanoarchitectonics (MANA), NIMS<br />
Address:<br />
1-1, Namiki, Tsukuba, Ibaraki 305-0044, Japan<br />
Email: TSURUOKA.Tohru@nims.go.jp<br />
Home Page:<br />
Presentation Title:<br />
Study of the switching mechanism for Ta2O5-based solid electrolyte resistive switch<br />
<strong>Abstract</strong>:<br />
Resistive switches composed of a solid electrolyte sandwiched between an anode and a<br />
cathode have good potential for use as nonvolatile switches and memories in large-scale<br />
integrated circuits. Resistive switching has previously observed mainly for ionic and electronic<br />
mixed conductors such as Ag2S and Cu2S. 1,2 Recently, another resistive switch, in which Ta2O5 is<br />
used as the solid electrolyte, was demonstrated in order to<br />
increase threshold voltages above the operating voltages of<br />
complementary metal-oxide-semiconductor devices. 3<br />
However, the switching mechanism of this resistive switch<br />
was not fully understood. Here we investigate the electronic<br />
transport of Ta2O5-based resistive switches with different<br />
electrode materials (Cu, Ag, Al, W, Au, and Pt) to reveal the<br />
switch mechanism.<br />
The switch device consists of cross-point structures with<br />
20-µm-wide top (anode) and bottom (cathode) electrodes.<br />
A 30-nm-thick Ta2O5 film was deposited between the two<br />
electrodes. Figure 1 shows typical I-V curves of<br />
Cu/Ta2O5/Pt and Ag/Ta2O5/Au structures. It was found that<br />
switching is occurred at low bias voltages only when Ag and<br />
Cu are used as the anode. The I-V measurements for<br />
switches with Pt, Au, W, and Al contacts indicated that the<br />
bottom interface with Pt and Au is non-ohmic (probably<br />
Schottky-like). From AC impedance measurements, we see<br />
that the difference in turn-on voltage between two switches<br />
of Fig. 1 comes from the difference of conductivity of Cu<br />
and Ag ions in the Ta2O5 film. By combining with these<br />
results and the results of Raman scattering measurements,<br />
we concluded that Cu and Ag metals precipitate in the Ta2O5<br />
film, and the switching behavior is determined by the<br />
electronic properties of two interfaces with the anode and<br />
cathode.<br />
References:<br />
[1] K. Terabe, T. Hasegawa, T. Nakayama, and M. Aono, Nature 433 (2005) 47.<br />
[2] T. Sakamoto et al., Appl. Phys. Lett. 82 (2003) 3032.<br />
[3] T. Sakamoto et al., Appl. Phys. Lett. 91 (2007). 092110.<br />
78<br />
Poster Session PS-8<br />
Fig. 1 I-V curves of two switch<br />
structures.