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Name (Title):<br />

Tohru Tsuruoka (MANA Scientist)<br />

Affiliation:<br />

International Center for Materials Nanoarchitectonics (MANA), NIMS<br />

Address:<br />

1-1, Namiki, Tsukuba, Ibaraki 305-0044, Japan<br />

Email: TSURUOKA.Tohru@nims.go.jp<br />

Home Page:<br />

Presentation Title:<br />

Study of the switching mechanism for Ta2O5-based solid electrolyte resistive switch<br />

<strong>Abstract</strong>:<br />

Resistive switches composed of a solid electrolyte sandwiched between an anode and a<br />

cathode have good potential for use as nonvolatile switches and memories in large-scale<br />

integrated circuits. Resistive switching has previously observed mainly for ionic and electronic<br />

mixed conductors such as Ag2S and Cu2S. 1,2 Recently, another resistive switch, in which Ta2O5 is<br />

used as the solid electrolyte, was demonstrated in order to<br />

increase threshold voltages above the operating voltages of<br />

complementary metal-oxide-semiconductor devices. 3<br />

However, the switching mechanism of this resistive switch<br />

was not fully understood. Here we investigate the electronic<br />

transport of Ta2O5-based resistive switches with different<br />

electrode materials (Cu, Ag, Al, W, Au, and Pt) to reveal the<br />

switch mechanism.<br />

The switch device consists of cross-point structures with<br />

20-µm-wide top (anode) and bottom (cathode) electrodes.<br />

A 30-nm-thick Ta2O5 film was deposited between the two<br />

electrodes. Figure 1 shows typical I-V curves of<br />

Cu/Ta2O5/Pt and Ag/Ta2O5/Au structures. It was found that<br />

switching is occurred at low bias voltages only when Ag and<br />

Cu are used as the anode. The I-V measurements for<br />

switches with Pt, Au, W, and Al contacts indicated that the<br />

bottom interface with Pt and Au is non-ohmic (probably<br />

Schottky-like). From AC impedance measurements, we see<br />

that the difference in turn-on voltage between two switches<br />

of Fig. 1 comes from the difference of conductivity of Cu<br />

and Ag ions in the Ta2O5 film. By combining with these<br />

results and the results of Raman scattering measurements,<br />

we concluded that Cu and Ag metals precipitate in the Ta2O5<br />

film, and the switching behavior is determined by the<br />

electronic properties of two interfaces with the anode and<br />

cathode.<br />

References:<br />

[1] K. Terabe, T. Hasegawa, T. Nakayama, and M. Aono, Nature 433 (2005) 47.<br />

[2] T. Sakamoto et al., Appl. Phys. Lett. 82 (2003) 3032.<br />

[3] T. Sakamoto et al., Appl. Phys. Lett. 91 (2007). 092110.<br />

78<br />

Poster Session PS-8<br />

Fig. 1 I-V curves of two switch<br />

structures.

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