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Name (Title):
Ayako Hashimoto (NIMS Postdoctor Researcher)
Affiliation:
International Center for Young Scientists – Sengen, NIMS
Address:
1-2-1 sengen, Tsukuba, Ibaraki 305-0047, Japan
Email: HASHIMOTO.Ayako@nims.go.jp
Home Page:
Presentation Title:
Three-dimensional Imaging with Confocal Scanning Transmission Electron Microscopy
Abstract:
Three-dimensional (3D) imaging has been an indispensable technique in various industrial and
scientific fields. Recently, confocal scanning transmission electron microscopy (STEM), which is
based on applying the principles of confocal imaging to transmission electron microscopy, has
attracted considerable interest as a promising depth-sectioning and 3D imaging technique [1,2].
Figure 1 shows a schematic drawing of the confocal STEM configuration. Depth sectioning can
be performed by rejecting electrons from an out-of-focal plane in a specimen (broken lines).
However, 3D imaging with confocal STEM has not yet been established because of practical
difficulties. In this work, we developed a stage-scanning system for STEM in order to overcome
the difficulties and applied to confocal
imaging. By using the system, only the
specimen is moved three-dimensionally
under the fixed lens configuration. A
specimen holder with a piezo-driven stage
was modified and controlled by computer
programming for stage scanning. Detected
signals are synchronized with the specimen
displacement and are displayed on a
computer screen as a stage-scanning STEM
image, as shown in Fig.1. Observation of
gold particles demonstrated that the
developed system is capable of atomicresolution
STEM imaging at desired Z
positions. Further, confocal STEM images
could be obtained under the confocal lens
configuration. Details of the stage-scanning
system and obtained results will be
discussed.
References :
[1] N. J. Zaluzec, Microsc. Today Vol. 6 (2003) 8-12.
[2] P. D. Nellist, G. Behan, A. I. Kirkland, and C. J. D. Hetherington, Appl. Phys. Lett. Vol. 89
(2006) 124105.
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Oral Presentation 32
Fig.1 Illustration of the confocal STEM configuration and
stage-scanning system.