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Physical Principles of Electron Microscopy: An Introduction to TEM ...

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Index 199<br />

EELS, 172<br />

Electromagnetic spectrum,<br />

visible region, 2<br />

ultraviolet region, 8<br />

x-ray region, 9<br />

<strong>Electron</strong>,<br />

backscattered, 128<br />

penetration depth, 129<br />

primary, 17<br />

secondary, 17, 128<br />

<strong>Electron</strong> gun, 58<br />

<strong>Electron</strong> range, 129<br />

<strong>Electron</strong> volt (eV), 5, 67<br />

<strong>Electron</strong> source, 65<br />

virtual, 71<br />

Elemental map, 143, 174<br />

Emission <strong>of</strong> electrons,<br />

field, 62<br />

Schottky, 62, 191<br />

thermionic, 58<br />

Energy,<br />

Fermi, 58<br />

vacuum, 58<br />

Energy loss, 95, 172<br />

Energy spread, 48, 182<br />

EPMA, 169<br />

Escape depth, 131<br />

Etching, 7, 122<br />

Extinction distance, 115<br />

Feedback, 22, 61, 70<br />

FIB machine, 122<br />

Field, depth <strong>of</strong>, 88, 145<br />

Field emission, 19<br />

Field <strong>of</strong> view, 6<br />

Fluorescence yield, 166<br />

Flyback, 127<br />

Focal length, 32, 41<br />

Focusing,<br />

dynamic, 147<br />

ideal, 27<br />

magnetic lens, 41<br />

Focusing power, 41<br />

Fourier transform, 187<br />

Fresnel fringe, 116<br />

Fringing field, 39<br />

Gaussian image plane, 44<br />

Gun, electron, 57<br />

High-voltage genera<strong>to</strong>r, 68<br />

Hologram, 184<br />

Human vision, 2<br />

Hysteresis effects, 82, 111<br />

Impact parameter, 97, 191<br />

Ionization edge, 173<br />

Illumination conditions, 72<br />

Illumination shift and tilt, 75<br />

Illumination system, 57<br />

Image,<br />

a<strong>to</strong>mic-column, 179<br />

backscattered, 137<br />

CL, 141<br />

cross-sectional, 124<br />

definition, 27<br />

EBIC, 139<br />

Foucault, 119<br />

Lorentz, 118<br />

plan-view, 124<br />

real, 2, 33<br />

retinal, 2<br />

secondary-electron, 131<br />

specimen-current, 139<br />

shadow, 185<br />

single-a<strong>to</strong>m, 20<br />

stroboscopic, 141<br />

virtual, 33<br />

voltage-contrast, 141<br />

Imaging lenses, 57, 78<br />

Immersion lens, 8, 43, 78<br />

Impact parameter, 97, 193<br />

Interaction volume, 129<br />

Inelastic scattering, 96

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