Index 199 EELS, 172 Electromagnetic spectrum, visible region, 2 ultraviolet region, 8 x-ray region, 9 <strong>Electron</strong>, backscattered, 128 penetration depth, 129 primary, 17 secondary, 17, 128 <strong>Electron</strong> gun, 58 <strong>Electron</strong> range, 129 <strong>Electron</strong> volt (eV), 5, 67 <strong>Electron</strong> source, 65 virtual, 71 Elemental map, 143, 174 Emission <strong>of</strong> electrons, field, 62 Schottky, 62, 191 thermionic, 58 Energy, Fermi, 58 vacuum, 58 Energy loss, 95, 172 Energy spread, 48, 182 EPMA, 169 Escape depth, 131 Etching, 7, 122 Extinction distance, 115 Feedback, 22, 61, 70 FIB machine, 122 Field, depth <strong>of</strong>, 88, 145 Field emission, 19 Field <strong>of</strong> view, 6 Fluorescence yield, 166 Flyback, 127 Focal length, 32, 41 Focusing, dynamic, 147 ideal, 27 magnetic lens, 41 Focusing power, 41 Fourier transform, 187 Fresnel fringe, 116 Fringing field, 39 Gaussian image plane, 44 Gun, electron, 57 High-voltage genera<strong>to</strong>r, 68 Hologram, 184 Human vision, 2 Hysteresis effects, 82, 111 Impact parameter, 97, 191 Ionization edge, 173 Illumination conditions, 72 Illumination shift and tilt, 75 Illumination system, 57 Image, a<strong>to</strong>mic-column, 179 backscattered, 137 CL, 141 cross-sectional, 124 definition, 27 EBIC, 139 Foucault, 119 Lorentz, 118 plan-view, 124 real, 2, 33 retinal, 2 secondary-electron, 131 specimen-current, 139 shadow, 185 single-a<strong>to</strong>m, 20 stroboscopic, 141 virtual, 33 voltage-contrast, 141 Imaging lenses, 57, 78 Immersion lens, 8, 43, 78 Impact parameter, 97, 193 Interaction volume, 129 Inelastic scattering, 96
200 Index Inner-shell ionization, 174, 20 Iris <strong>of</strong> the eye, 3 k-fac<strong>to</strong>r, 166 Kinematics <strong>of</strong> scattering, 93 Lattice, 106 Lattice parameter, 110 Lens, convex, 30 diverging, 43 eye, 3 einzel, 35 electrostatic, 34 immersion, 8, 43 magnetic, 35 multipole, 180 quadrupole, 54, 52, 173 SEM, 125, 146 <strong>TEM</strong> condenser, 70 <strong>TEM</strong> imaging, 78 Lithography, 151 Lorentzian function, 41 Magnetic force, 35 Magnification, 28 angular, 4 empty, 6 minimum, 5 SEM, 128 <strong>TEM</strong>, 83 Mass-thickness, 129, 101 Maxwell, imaging rules, 27, 127 Microscope, a<strong>to</strong>mic-force, 24 biological, 6, 79 compound, 5 electron, 11 high-voltage, 15 metallurgical, 7 pho<strong>to</strong>electron, 180 scanning electron, 17 scanning-tunneling, 21 S<strong>TEM</strong>, 7, 11 Miller indices, 110 Misalignment, 40 Monochroma<strong>to</strong>r, 182 Monte Carlo calculations, 130 Multichannel analyzer, 163 Nanoprobe, 79, 126 Nanotechnology, 153 Noise, image, 128, 134, 136, 140 in XEDS, 165, 160, 162 O-rings, 40 Objective aperture, 82 Objective lens, 78, 126 Objective stigma<strong>to</strong>r, 82 Optics, electron, 34 geometrical, 32 ion, 43 physical, 32 x-ray, 9, 152 Organelles, 15 Paraxial rays, 30 Phosphor screen, 85, 142 Pho<strong>to</strong>graphic recording, 85 Pho<strong>to</strong>multiplier tube, 134 Pixels, 128 Plane, back-focal, 32 principal, 32, 80 Plasmon excitation, 173 Point resolution, 47 Poisson statistics, 99 Polepieces, 39 Polycrystalline solid, 96 Post-field, 79 Pre-field, 78
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Ray F. Egerton Physical Principles
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To Maia
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viii Contents 3.3 Condenser-Lens Sy
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PREFACE The telescope transformed o
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Chapter 1 AN INTRODUCTION TO MICROS
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An Introduction to Microscopy 3 In
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An Introduction to Microscopy 5 Cha
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An Introduction to Microscopy 7 eye
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An Introduction to Microscopy 9 can
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An Introduction to Microscopy 11 1.
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An Introduction to Microscopy 13 Fi
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An Introduction to Microscopy 15 Fi
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An Introduction to Microscopy 17 1.
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An Introduction to Microscopy 19 Fi
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An Introduction to Microscopy 21 1.
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An Introduction to Microscopy 23 A
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An Introduction to Microscopy 25 el
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28 Chapter 2 Rule 1 states that for
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30 Chapter 2 that is curved rather
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32 Chapter 2 x 0 object principal p
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34 Chapter 2 2.3. Imaging with Elec
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36 Chapter 2 cross-product or vecto
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38 Chapter 2 important to remember
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40 Chapter 2 A cross section throug
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42 Chapter 2 As an example, we can
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44 Chapter 2 microscopes, at a time
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46 Chapter 2 When these non-paraxia
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48 Chapter 2 So far, we have said n
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50 Chapter 2 from the lens) for ele
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52 Chapter 2 P (a) P (b) y y x x +V
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54 Chapter 2 The stigmators found i
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Chapter 3 THE TRANSMISSION ELECTRON
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The Transmission Electron Microscop
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The Transmission Electron Microscop
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The Transmission Electron Microscop
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The Transmission Electron Microscop
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The Transmission Electron Microscop
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Chapter 4 TEM SPECIMENS AND IMAGES
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TEM Specimens and Images 95 v 0 m M
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TEM Specimens and Images 97 In prac
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TEM Specimens and Images 99 P e (>
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TEM Specimens and Images 101 4.4 Sc
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TEM Specimens and Images 103 Figure
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TEM Specimens and Images 105 as see
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TEM Specimens and Images 107 dimens
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TEM Specimens and Images 109 (discu
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TEM Specimens and Images 111 Figure
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TEM Specimens and Images 113 core,
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TEM Specimens and Images 115 unders
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TEM Specimens and Images 117 underf
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TEM Specimens and Images 119 From t
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TEM Specimens and Images 121 (a) (b
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TEM Specimens and Images 123 of a s
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Chapter 5 THE SCANNING ELECTRON MIC
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The Scanning Electron Microscope 12
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The Scanning Electron Microscope 12
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