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Physical Principles of Electron Microscopy: An Introduction to TEM ...

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202 Index<br />

Stacking fault, 114<br />

Stage,<br />

side-entry, 76<br />

<strong>to</strong>p-entry, 77<br />

S<strong>TEM</strong>, 18, 177<br />

Steradian, 65<br />

Stigma<strong>to</strong>r, 52<br />

condenser, 74<br />

objective, 82, 145<br />

SEM, 145<br />

STM, 21<br />

Surface replica, 103<br />

Symmetry, axial, 34�39<br />

Symmetry, crystal, 112<br />

Synchrotron source, 10<br />

<strong>TEM</strong>,<br />

his<strong>to</strong>ry, 11<br />

construction, 57<br />

Thickness fringes, 114<br />

Thickness measurement, 174<br />

Thin-film deposition, 122<br />

Thin-lens approximation, 32<br />

Thinning <strong>of</strong> specimens, 121<br />

Topographic contrast,<br />

in SEM, 131<br />

in STM, 22<br />

Tunneling, 21, 63<br />

Ultrafast microscopy, 188<br />

Ultramicro<strong>to</strong>me, 101, 120<br />

Unit cell, 110<br />

Units <strong>of</strong> length, 1<br />

Vacancy clusters, 114<br />

Vacuum system, 88<br />

Viewing screen, 85<br />

Water window, 10<br />

Wavelength,<br />

<strong>of</strong> electrons, 11, 117<br />

<strong>of</strong> light, 2<br />

Wehnelt electrode, 61<br />

Wien filter, 183<br />

Work function, 58<br />

Working distance, 143<br />

X-ray,<br />

bremsstrahlung, 160<br />

characteristic, 158<br />

X-ray microscope, 9<br />

X-ray spectroscopy, 158, 143<br />

XEDS, 161<br />

XWDS, 168<br />

Y-modulation, 25<br />

Yield,<br />

backscattering, 137<br />

fluorescence, 166<br />

secondary-electron, 131<br />

<strong>to</strong>tal-electron, 148<br />

Z-contrast, 101<br />

ZAF correction, 167<br />

Zero-loss peak, 173<br />

Zone plate, 9, 152

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