Index 201 Principal plane, 32, 80 Probe, electron, 17, 126 scanning, 21 Prism glass, 30 magnetic, 172 Pulse-height analysis, 163 Pump, cryo, 91 diffusion, 89 ion, 90 rotary, 88 turbomolecular, 90 Pupil <strong>of</strong> the eye, 3 Quantum number, 155 Quadrupole, 52, 54, 173 Raster scanning, 17, 126 Radiation damage, 151, 182 Ray diagram, 32, 34 Rayleigh criterion, 4, 81 Refractive index, 8, 30 Relativistic mass, 68 Replica, 103 Resist, 151 Resis<strong>to</strong>r, bias, 61, 70 feedback, 69 Resolution, <strong>of</strong> eye, 5 <strong>of</strong> light microscope, 6 <strong>of</strong> retina, 4 <strong>of</strong> SEM, 144, 125, 126 <strong>of</strong> <strong>TEM</strong>, 82, 180, 182 Richardson law, 59 Ripple, 43, 49, 69 Ronchigram, 182 Rotation angle <strong>of</strong> image, 42 Rutherford scattering, 93, 193 Rydberg energy, 155 Saturated filament, 62 Scanning, digital, 127 raster, 126, 17 Scattering, 93 angular distribution, 97 cross section, 97 elastic, 96 inelastic, 96, 49 Scattering contrast, 80 Scintilla<strong>to</strong>r, 134 Secondary electrons, 17 Screen, SEM display, 128 <strong>TEM</strong> viewing, 85 Screening, 99 SEM, 17, 125 environmental, 149 low-voltage, 149 SE1 component, 143 Shadowing, 104, 136 Single scattering, 99 Spatial resolution, <strong>of</strong> the retina, 4 <strong>of</strong> the eye, 5 <strong>of</strong> a light microscope, 6 Specimen, amorphous, 100 cross-sectional, 124 insulating, 148 polycrystalline, 96 single-crystal, 112 <strong>TEM</strong> thickness, 101, 88 Specimen preparation, SEM, 147 <strong>TEM</strong>, 119 Specimen stage, 75, 57 Spectroscopy, Auger, 171 energy-loss, 172 x-ray, 161, 168 Staining, 6, 15, 101
202 Index Stacking fault, 114 Stage, side-entry, 76 <strong>to</strong>p-entry, 77 S<strong>TEM</strong>, 18, 177 Steradian, 65 Stigma<strong>to</strong>r, 52 condenser, 74 objective, 82, 145 SEM, 145 STM, 21 Surface replica, 103 Symmetry, axial, 34�39 Symmetry, crystal, 112 Synchrotron source, 10 <strong>TEM</strong>, his<strong>to</strong>ry, 11 construction, 57 Thickness fringes, 114 Thickness measurement, 174 Thin-film deposition, 122 Thin-lens approximation, 32 Thinning <strong>of</strong> specimens, 121 Topographic contrast, in SEM, 131 in STM, 22 Tunneling, 21, 63 Ultrafast microscopy, 188 Ultramicro<strong>to</strong>me, 101, 120 Unit cell, 110 Units <strong>of</strong> length, 1 Vacancy clusters, 114 Vacuum system, 88 Viewing screen, 85 Water window, 10 Wavelength, <strong>of</strong> electrons, 11, 117 <strong>of</strong> light, 2 Wehnelt electrode, 61 Wien filter, 183 Work function, 58 Working distance, 143 X-ray, bremsstrahlung, 160 characteristic, 158 X-ray microscope, 9 X-ray spectroscopy, 158, 143 XEDS, 161 XWDS, 168 Y-modulation, 25 Yield, backscattering, 137 fluorescence, 166 secondary-electron, 131 <strong>to</strong>tal-electron, 148 Z-contrast, 101 ZAF correction, 167 Zero-loss peak, 173 Zone plate, 9, 152
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Ray F. Egerton Physical Principles
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To Maia
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viii Contents 3.3 Condenser-Lens Sy
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PREFACE The telescope transformed o
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Chapter 1 AN INTRODUCTION TO MICROS
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An Introduction to Microscopy 3 In
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An Introduction to Microscopy 5 Cha
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An Introduction to Microscopy 7 eye
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An Introduction to Microscopy 9 can
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An Introduction to Microscopy 11 1.
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An Introduction to Microscopy 13 Fi
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An Introduction to Microscopy 15 Fi
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An Introduction to Microscopy 17 1.
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An Introduction to Microscopy 21 1.
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An Introduction to Microscopy 23 A
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An Introduction to Microscopy 25 el
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28 Chapter 2 Rule 1 states that for
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30 Chapter 2 that is curved rather
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32 Chapter 2 x 0 object principal p
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34 Chapter 2 2.3. Imaging with Elec
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36 Chapter 2 cross-product or vecto
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38 Chapter 2 important to remember
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40 Chapter 2 A cross section throug
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42 Chapter 2 As an example, we can
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44 Chapter 2 microscopes, at a time
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46 Chapter 2 When these non-paraxia
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48 Chapter 2 So far, we have said n
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50 Chapter 2 from the lens) for ele
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52 Chapter 2 P (a) P (b) y y x x +V
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54 Chapter 2 The stigmators found i
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Chapter 3 THE TRANSMISSION ELECTRON
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The Transmission Electron Microscop
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The Transmission Electron Microscop
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Chapter 4 TEM SPECIMENS AND IMAGES
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TEM Specimens and Images 95 v 0 m M
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TEM Specimens and Images 97 In prac
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TEM Specimens and Images 99 P e (>
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TEM Specimens and Images 101 4.4 Sc
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TEM Specimens and Images 103 Figure
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TEM Specimens and Images 105 as see
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TEM Specimens and Images 107 dimens
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TEM Specimens and Images 109 (discu
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TEM Specimens and Images 111 Figure
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TEM Specimens and Images 113 core,
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TEM Specimens and Images 115 unders
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TEM Specimens and Images 117 underf
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TEM Specimens and Images 119 From t
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TEM Specimens and Images 121 (a) (b
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TEM Specimens and Images 123 of a s
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Chapter 5 THE SCANNING ELECTRON MIC
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The Scanning Electron Microscope 12
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