Physical Principles of Electron Microscopy: An Introduction to TEM ...

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Contents ix 7. Recent Developments 177 7.1 Scanning Transmission Electron Microscopy 177 7.2 Aberration Correction 180 7.3 Electron-Beam Monochromators 182 7.4 Electron Holography 184 7.5 Time-Resolved Microscopy 188 Appendix: Mathematical Derivations 191 A.1 The Schottky Effect 191 A.2 Impact Parameter in Rutherford Scattering 193 References 195 Index 197
PREFACE The telescope transformed our view of the universe, leading to cosmological theories that derive support from experiments involving elementary particles. But microscopes have been equally important, by helping us to understand both inanimate matter and living objects at their elementary level. Initially, these instruments relied on the focusing of visible light, but within the past 50 years other forms of radiation have been used. Of these, electrons have arguably been the most successful, by providing us with direct images down to the atomic level. The purpose of this book is to introduce concepts of electron microscopy and to explain some of the basic physics involved at an undergraduate level. It originates from a one-semester course at the University of Alberta, designed to show how the principles of electricity and magnetism, optics and modern physics (learned in first or second year) have been used to develop instruments that have wide application in science, medicine and engineering. Finding a textbook for the course has always been a problem; most electron microscopy books overwhelm a non-specialist student, or else they concentrate on practical skills rather than fundamental principles. Over the years, this course became one of the most popular of our “general interest” courses offered to non-honors students. It would be nice to think that the availability of this book might facilitate the introduction of similar courses at other institutions. At the time of writing, electron microscopy is being used routinely in the semiconductor industry to examine devices of sub-micrometer dimensions. Nanotechnology also makes use of electron beams, both for characterization and fabrication. Perhaps a book on the basics of TEM and SEM will benefit the engineers and scientists who use these tools. The more advanced student or professional electron microscopist is already well served by existing
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52 Chapter 2 P (a) P (b) y y x x +V
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54 Chapter 2 The stigmators found i
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Chapter 3 THE TRANSMISSION ELECTRON
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The Transmission Electron Microscop
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Chapter 4 TEM SPECIMENS AND IMAGES
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TEM Specimens and Images 95 v 0 m M
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TEM Specimens and Images 97 In prac
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TEM Specimens and Images 99 P e (>
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TEM Specimens and Images 101 4.4 Sc
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TEM Specimens and Images 103 Figure
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TEM Specimens and Images 105 as see
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TEM Specimens and Images 107 dimens
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TEM Specimens and Images 109 (discu
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TEM Specimens and Images 111 Figure
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TEM Specimens and Images 113 core,
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TEM Specimens and Images 117 underf
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TEM Specimens and Images 119 From t
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TEM Specimens and Images 121 (a) (b
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TEM Specimens and Images 123 of a s
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Chapter 5 THE SCANNING ELECTRON MIC
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The Scanning Electron Microscope 12
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158 Chapter 6 Many-electron atoms r
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162 Chapter 6 x-ray computer & disp
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164 Chapter 6 Ideally, each peak in
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166 Chapter 6 to balance the units
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174 Chapter 6 A typical energy-loss
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Chapter 7 RECENT DEVELOPMENTS 7.1 S
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Recent Developments 179 Figure 7-2.
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Recent Developments 181 below 0.1 n
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Recent Developments 185 Besides hav
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Recent Developments 187 Figure 7-7.
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Recent Developments 189 holder cont
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192 Appendix cathode vacuum + + + +
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194 Appendix The variable � repre
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196 References Neutze, R., Wouts, R
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198 Index Bright-field image, 100 B
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200 Index Inner-shell ionization, 1
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202 Index Stacking fault, 114 Stage
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