Series 360, Granville-Phillips, Stabil-Ion, Ionization, Vacuum ...

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Table of Contents Chapter 4 Preparing the Stabil-Ion System for Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1 Preparing for Pressure Measurement with the Stabil-Ion Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.1.1 Alternate ON/OFF Gauge Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 4.1.2 Gas Scale Factor Adjustment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 4.1.3 Overpressure Shutdown. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5 4.2 Degassing the Stabil-Ion Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5 4.2.1 Pressure Indication During Degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.2.2 Degas Power Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.2.3 Degas Power Limiter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.2.4 Gauge Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.3 Alternate Cathode Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7 4.4 Stabil-Ion Gauge Calibration Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.4.1 Memory Modules for Stabil-Ion Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.4.2 Using a Memory Module for IG1 or IG2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8 4.5 Stabil-Ion Gauge Analog Output Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.6 Preparing for Convectron Gauge Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.6.1 Understanding Pressure Measurement in Gases other than Nitrogen (or Air) . . . . . . . . . . . . . . 4-12 4.6.2 Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13 4.7 Convectron Gauge Calibration Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21 4.7.1 Memory Module for Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21 4.7.2 Using a Memory Module for Convectron A or B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21 4.8 Ionization Gauge Auto Turn On/Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23 4.8.1 To Set the On/Off Pressure for IG1/IG2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23 4.9 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications . . . . . . . . . . . . . . . . . . 4-24 4.10 Convectron Gauge Analog Output Signal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25 4.11 Preparing for Process Control Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26 4.11.1 Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26 4.11.2 To Display a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26 4.11.3 To Modify a Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27 4.12 Preparing for Use of the RS-232 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27 4.12.1 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28 4.13 Preparing for Use of the IEEE 488 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 4.13.1 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 Chapter 5 Operation of a Stabil-Ion System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 Chapter 6 Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.1 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.2 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 6.3 Fault Relay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4 6.4 Overpressure Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5 6.5 Electrometer Minimum Calibration Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6 6.6 Flashing Degas Light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6 6.7 Troubleshooting the Convectron Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7 6.8 Convectron Gauge Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8 6.9 Cleaning Contaminated Convectron Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8 6.10 Process Control Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9 6.11 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9 6.12 IEEE 488 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10 6.13 Field Installation of Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10 6.14 Troubleshooting Flow Charts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11 6.15 Service Form . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Index-1 ii Series 360 Stabil-Ion December, 2001
Safety Safety Safety Instructions START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points in these instructions. These safety alert symbols in this manual or on the Product rear panel, mean caution - personal safety, property damage or danger from electric shock. Read these instructions carefully. In these instructions the word “product” refers to the 360 Stabil-Ion Vacuum Measurement System and all of its approved parts and accessories. NOTE: These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact Helix Technology Corporation at the address on the title page of this manual. This product has been designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions. Failure to comply with these instructions may result in serious personal injury, including death, or property damage. These safety precautions must be observed during all phases of operation, installation, and service of this product. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. Helix Technology Corporation disclaims all liability for the customer's failure to comply with these requirements. The service and repair information in this manual is for the use of Qualified Service Personnel. To avoid shock, do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so. ■ ■ ■ ■ ■ Read Instructions – Read all safety and operating instructions before operating the product. Retain Instructions – Retain the Safety and Operating Instructions for future reference. Heed Warnings – Adhere to all warnings on the product and in the operating instructions. Follow Instructions – Follow all operating and maintenance instructions. Accessories – Do not use accessories not recommended in this manual as they may be hazardous. To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. Objects and Liquid Entry - Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock. Be careful not to spill liquid of any kind onto the products. Series 360 Stabil-Ion December, 2001 iii
Page 1 and 2: Series 360 1Granville-Phillips Stab
Page 3: Table of Contents Safety. . . . . .
Page 7 and 8: Safety Proper Grounding: All compon
Page 9 and 10: Safety Certification Helix Technolo
Page 11 and 12: Chapter 1 1 System Components 1 5 8
Page 13 and 14: 1 System Components 23 22 21 20 19
Page 15 and 16: 1 System Components 10 9 8 POWER 50
Page 17 and 18: Chapter 2 2 Initial Setup Procedure
Page 19 and 20: 2 Initial Setup Procedures 2.1.2 Pr
Page 21 and 22: 2 Initial Setup Procedures 2.1.4 Pr
Page 23 and 24: 2 Initial Setup Procedures 2.1.4.1
Page 27 and 28: 2 Initial Setup Procedures 2.1.5.1.
Page 31 and 32: 2 Initial Setup Procedures 2.2 Powe
Page 33 and 34: Chapter 3 3 Installation It is the
Page 35 and 36: 3 Installation ■ ■ ■ Avoid co
Page 37 and 38: 3 Installation 3.4 Installing the C
Page 39 and 40: 3 Installation 3.5 Connecting Analo
Page 41 and 42: 3 Installation 1. Using Table 3-1 a
Page 43 and 44: 3 Installation Table 3-2 Connection
Page 45 and 46: 3 Installation 3.7.3 Using the Remo
Page 47 and 48: 3 Installation RTS Negated by 360 o
Page 49 and 50: 3 Installation 3. Connect the Stabi
Page 51 and 52: 3 Installation 3.11 Connecting the
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4 Preparing the Stabil-Ion System f
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Chapter 5 5 Operation of a Stabil-I
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Chapter 6 6 Service and Maintenance
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6 Service and Maintenance Symptom I
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6 Service and Maintenance 6.4 Overp
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6 Service and Maintenance 6.7 Troub
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6 Service and Maintenance 6.10 Proc
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6 Service and Maintenance 9. Carefu
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6 Service and Maintenance CONVECTRO
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Index A AC line voltage Between 180
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