Series 360, Granville-Phillips, Stabil-Ion, Ionization, Vacuum ...
Series 360, Granville-Phillips, Stabil-Ion, Ionization, Vacuum ...
Series 360, Granville-Phillips, Stabil-Ion, Ionization, Vacuum ...
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4 Preparing the <strong>Stabil</strong>-<strong>Ion</strong> System for Operation<br />
10<br />
10 -2<br />
1<br />
10 -3<br />
10 -1<br />
10 -4<br />
normal operation<br />
10 -2<br />
Pressure (Torr) (mbar)<br />
10 -5<br />
10 -6<br />
10 -7<br />
10 -1 10 -9<br />
during degas<br />
10 -3<br />
10 -4<br />
10 -5<br />
Pressure (Pa)<br />
10 -8<br />
10 -6<br />
10 -9<br />
10 -7<br />
10 -10<br />
10 -8<br />
10 -11<br />
0 1 2 3 4 5 6 7 8 9 10<br />
IG analog output (V)<br />
Fig. 4.8 <strong>Ion</strong>ization gauge analog output vs pressure.<br />
11<br />
gauge<br />
off<br />
Figure 4-9<br />
<strong>Ion</strong>ization Gauge Analog Output vs. Pressure.<br />
4.6 Preparing for Convectron Gauge Operation<br />
Convectron Gauge pressures are indicated on lines A and B of the <strong>360</strong> Controller display.<br />
Using the N 2 calibration to pressurize a vacuum system above about 1 Torr<br />
with certain other gases can cause dangerously high pressures which may<br />
cause explosion of the system. See Section 4.6.1 on page 4-12 before<br />
using with other gases.<br />
Install suitable devices that will limit the pressure to the level that the vacuum system can safely<br />
withstand. In addition, install suitable pressure relief valves or rupture disks that will release<br />
pressure at a level considerably below that pressure which the system can safely withstand.<br />
Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under<br />
“Valves, Relief”, and “Discs, Rupture”.<br />
Confirm that these safety devices are properly installed before installing the product. In addition,<br />
check that (1) the proper gas cylinders are installed, (2) gas cylinder valve positions are correct on<br />
manual systems, and (3) the automation is correct on automated systems.<br />
<strong>Vacuum</strong> gauges with compression fittings may be forcefully ejected if the vacuum system is<br />
pressurized.<br />
<strong>Series</strong> <strong>360</strong> <strong>Stabil</strong>-<strong>Ion</strong> December, 2001<br />
4-11