Series 360, Granville-Phillips, Stabil-Ion, Ionization, Vacuum ...

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6 Service and Maintenance 6.2 Damage Requiring Service Disconnect this product from the wall outlet and any other power sources, and refer servicing to Qualified Service Personnel if any the following conditions exist: ■ ■ ■ ■ ■ ■ The gauge cable, power-supply cord, or plug is damaged. Liquid has been spilled onto, or objects have fallen into, the product. The product has been exposed to rain or water. The product does not operate normally even if you have followed the Operation Instructions. Adjust only those controls that are covered in the instruction manual. Improper adjustment of other controls may result in damage and require extensive work by a qualified technician to restore the product to its normal operation. The product has been dropped or the enclosure has been damaged. The product exhibits a distinct change in performance. This may indicate a need for service. Replacement Parts - When replacement parts are required, be certain to use the replacement parts that are specified by Helix Technology, or that have the same characteristics as the original parts. Unauthorized substitutions may result in fire, electric shock or other hazards. Safety Check - Upon completion of any service or repairs to this product, ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order. Finite Lifetime - After ten years of normal use or even non-use, the electrical insulation in this product may become less effective at preventing electrical shock. Under certain environmental conditions which are beyond the manufacturer’s control, some insulation material may deteriorate sooner. Therefore, periodically inspect all electrical insulation for cracks, crazing, or other signs of deterioration. Do not use if the electrical insulation has become unsafe. Table 6-1 Symptom General Symptoms/Possible Causes. Possible Cause Unit will not power-up, no response to power switch. Power fuse blows repeatedly. Fault relay tripped. Power fuse blown. Wrong line voltage selection, see Section 2.2 on page 2-15. Power interconnect cable improperly connected. See Figure 3-18 on page 3-19. Wrong fuse rating. Wrong line voltage selection, see Section 2.2 on page 2-15. Unplugged Convectron Gauge or sensor broken in Convectron Gauge. Convectron Gauge zero badly out of calibration. Microprocessor reset occurring on a module (probable circuit failure). Checksum failure on process control board. (See Section 6.10 on page 6-9.) Cycle power and check all setpoints. 6-2 Series 360 Stabil-Ion December, 2001
6 Service and Maintenance Symptom IG will not turn on, or turns on briefly then shuts off. IG display shows a steady number when IG is off. Convectron Gauge display reads a fixed (non changing) pressure. Pressure reading is higher than expected. Degas will not turn on. IG shuts off when degas is initiated. IG pressure reads extremely low. IG pressure readout very erratic. Green +18 LED out on control board. Possible Cause IG at too high pressure. Auto turn off circuit in Convectron Gauge module is shutting off IG. Emission current setting wrong for pressure in gauge. Improper IG connector hookup. Badly contaminated IG. Damaged or contaminated cathode coating, will not sustain emission. Try alternate cathode. Short in IG cable. Short between IG electrodes. Open cathode in IG. Try alternate cathode. Scale factor switch is not in its center position. IG AUTO switch is left in the SET position. IG contaminated. Low (L) pressure range is not selected appropriately (pressure is below 10 -7 Torr). Interference from other ion source. Poor conductance in gauge's vacuum connection to chamber. Gas source in plumbing to gauge, such as leak or contamination. Chamber pressure high because of leak, contamination, or pump failure. Poor location selected for gauge. Faulty gauge or power cable. Faulty electrometer. System pressure above 5 x 10 -5 Torr. IG not turned on. Degas fuse blown. Badly contaminated IG. Collector unplugged. Bad collector cable. Faulty electrometer. IG badly contaminated. Improper IG or Controller grounding. Bad collector cable. Excessive noise source. Interference from other charged particle source in chamber. Faulty electrometer. Improper connection of Power Supply cable. +18 volt supply to relays faulty. Series 360 Stabil-Ion December, 2001 6-3
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Series 360 1Granville-Phillips Stab
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Table of Contents Safety. . . . . .
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Safety Safety Safety Instructions S
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Safety Proper Grounding: All compon
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Safety Certification Helix Technolo
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Chapter 1 1 System Components 1 5 8
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1 System Components 23 22 21 20 19
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1 System Components 10 9 8 POWER 50
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Chapter 2 2 Initial Setup Procedure
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2 Initial Setup Procedures 2.1.2 Pr
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2 Initial Setup Procedures 2.1.4 Pr
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2 Initial Setup Procedures 2.1.4.1
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2 Initial Setup Procedures 2.1.5.1.
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2 Initial Setup Procedures 2.2 Powe
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Chapter 3 3 Installation It is the
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3 Installation ■ ■ ■ Avoid co
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3 Installation 3.4 Installing the C
Page 39 and 40: 3 Installation 3.5 Connecting Analo
Page 41 and 42: 3 Installation 1. Using Table 3-1 a
Page 43 and 44: 3 Installation Table 3-2 Connection
Page 45 and 46: 3 Installation 3.7.3 Using the Remo
Page 47 and 48: 3 Installation RTS Negated by 360 o
Page 49 and 50: 3 Installation 3. Connect the Stabi
Page 51 and 52: 3 Installation 3.11 Connecting the
Page 53 and 54: Chapter 4 4 Preparing the Stabil-Io
Page 55 and 56: 4 Preparing the Stabil-Ion System f
Page 87 and 88: Chapter 5 5 Operation of a Stabil-I
Page 89: Chapter 6 6 Service and Maintenance
Page 93 and 94: 6 Service and Maintenance 6.4 Overp
Page 95 and 96: 6 Service and Maintenance 6.7 Troub
Page 97 and 98: 6 Service and Maintenance 6.10 Proc
Page 99 and 100: 6 Service and Maintenance 9. Carefu
Page 101 and 102: 6 Service and Maintenance CONVECTRO
Page 103 and 104: Index A AC line voltage Between 180
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