Annual Report 2011-2012

Annual Research Report 2011-2012
Project Title:
Design and Fabrication of MEMS type Thermal conductivity
Hydrogen sensor with its Online Analyzer
Department: Electronics, Control and Instrumentation Projec tmanager: MortezaMozafari
Employer: Esfahan Regional Electric Company, Niroo Research Institute ProjectCode: JCNBE0
Project Staff: MortezaMozafari, Ali Melli, Mohammad Amin Kashiha, Yaldarajabzadeh,
Pedramkeshavarzian, Somayehgholami, SaeedGolkhani, Hassan Koozegar
Project Summary:
After 2 years of efforts, the first Iranian system for measuring the purity of hydrogen of
power plants generators was designed and built by electronics, control and
instrumentation research department of NRI and with cooperation of the Esfehan
regional electricity utility and shahidMontazeri power plant.
So the technical knowledge of design and manufacturing of industrial MEMS sensors
for measuring the purity of the gases was localized in the country.
In this system, the measurement of hydrogen purity is done by an analyzer and a MEMS
chip. MEMS technology is the integration of electronics and mechanical elements in
micron scale, which is based on silicon wafers with high sensitivity. MEMS technology
provides highly accurate measuring.
Hydrogen purity measurement systems are critical equipments in the power plants witch
are utilized for high-capacity generators and in their cooling systems.
Now, to meet the needs of power plants, generally Russian, American and English
systems are used. It should be noted that our system was installed in parallel with a
foreign system at ShahidMontazeri power plant more than 4 months, and after running
various tests, accuracy and performance of the system was approved.
According to the economic estimates, we predict about 300 thousand dollars annual
saving in foreign import in electricity industry of the country.
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