PCT/2001/12 : PCT Gazette, Weekly Issue No. 12, 2001 - WIPO

12/2001
22 Mar/mar 2001 PCT Gazette - Section I - Gazette du PCT 4841
(43) 22 Mar/mar 2001 (22.03.2001)
(54) WAVELENGTH REFERENCE DEVICE
DISPOSITIF DE REFERENCE EN LON-
GUEUR D’ONDE
(71) CORETEK, INC. [US/US]; 299 Ballardvale
Street, Wilmington, MA 01887 (US).
(72) WATTERSON, Reich; 18 Battlegreen Road,
Lexington, MA 02421 (US). TAYEBATI,
Parviz; 65 East India Road, Apartment 2C,
Boston, MA 02110 (US). MCCALLION,
Kevin; 127 St. Botolph Street, Apartment 9,
Boston, MA 02115 (US). VAKHSHOORI,
Daryoosh; 10 Rogers Street, Apartment 205,
Cambridge, MA 02142 (US).
(74) PANDISCIO, Mark, J.; Pandiscio & Pandiscio,
470 Totten Pond Road, Waltham, MA
02451-1914 (US).
(81) CA.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
Published / Publiée :(c)
(51) 7 G01B 9/02
(11) WO 01/20252 (13) A1
(21) PCT/US00/25377
(22) 15 Sep/sep 2000 (15.09.2000)
(25) en (26) en
(30) 60/154,266 16 Sep/sep 1999 US
(16.09.1999)
(30) Not furnished / 14 Sep/sep 2000 US
non communiqué (14.09.2000)
(43) 22 Mar/mar 2001 (22.03.2001)
(54) METHOD AND APPARATUS FOR
PERFORMING OPTICAL MEASURE-
MENTS OF LAYERS AND SURFACE
PROPERTIES
EXECUTION DE MESURES OP-
TIQUES POUR COUCHES ET CA-
RACTERISTIQUES SUPERFICIELLES
(71) ON-LINE TECHNOLOGIES, INC.
[US/US]; 87 Church Street, P.O. Box 380379,
East Hartford, CT 06138-0379 (US).
(72) ROSENTHAL, Peter, A.; 10 Farmstead
Lane, West Simsbury, CT 06092 (US). XU,
Jiazhan; 130 Vernon Avenue #4W, Vernon,
CT 06066 (US).
(74) DORMAN, Ira, S.; Suite 200, 330 Roberts
Street, East Hartford, CT 06108 (US).
(81) AE AL AM AT AU AZ BA BB BG BR BY
CA CH CN CU CZ DE DK EE ES FI GB GD
GE GH GM HR HU ID IL IN IS JP KE KG
KP KR KZ LC LK LR LS LT LU LV MD MG
MK MN MW MX NO NZ PL PT RO RU SD
SE SG SI SK SL TJ TM TR TT UA UG UZ
VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI FR
GB GR IE IT LU MC NL PT SE); OA (BF BJ
CF CG CI CM GA GN GW ML MR NE SN
TD TG).
(51) 7 G01B 11/00, G01S 17/02
(11) WO 01/20253 (13) A1
(21) PCT/JP00/06235
(22) 12 Sep/sep 2000 (12.09.2000)
(25) ja (26) ja
(30) 11/298691 12 Sep/sep 1999 JP
(12.09.1999)
(43) 22 Mar/mar 2001 (22.03.2001)
(54) METHOD AND APPARATUS FOR
SEARCHING FOR OBJECT WITH
SPECKLE PATTERN LIGHT
PROCEDE ET APPAREIL DE RE-
CHERCHE D’OBJET EN LUMIERE EN
SPECKLE
(71) ALPHATECH CO., LTD. [JP/JP]; 22-18,
Tuji 8-chome, Urawa-shi, Saitama 336-0026
(JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) UMETU, Katuo [JP/JP]; 6-5-201, Tuji
8-chome, Urawa-shi, Saitama 336-0026 (JP).
(74) KASAI, Shiro; Okada Building, 4F, 6-9,
Shinbashi 6-chome, Minato-ku, Tokyo
105-0004 (JP).
(81) CN US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
(51) 7 G01B 11/06
(11) WO 01/20254 (13) A1
(21) PCT/US00/25028
(22) 13 Sep/sep 2000 (13.09.2000)
(25) en (26) en
(30) 60/153,932 15 Sep/sep 1999 US
(15.09.1999)
(30) 09/658,812 11 Sep/sep 2000 US
(11.09.2000)
(43) 22 Mar/mar 2001 (22.03.2001)
(54) SPATIAL AVERAGING TECHNIQUE
FOR ELLIPSOMETRY AND REFLEC-
TOMETRY
ELLIPSOMETRIE ET REFLECTOME-
TRIE A MOYENNAGE TRIDIMEN-
SIONNEL
(71) THERMA-WAVE, INC. [US/US]; 1250 Reliance
Way, Fremont, CA 94539 (US).
(72) WEI, Lanhua; 34309 Eucalyptus Terrace,
Fremont, CA 94555 (US). CHU, Hanyou;
3665 Benton Street, #71, Santa Clara, CA
95051 (US). OPSAL, Jon; 2295 Norwood
Road, Livermore, CA 94550 (US).
(74) STALLMAN, Michael, A. et al. / etc.; Limbach
& Limbach L.L.P., 2001 Ferry Building,
San Francisco, CA 94111 (US).
(81) JP.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
Published / Publiée :(a)
(51) 7 G01B 11/24
(11) WO 01/20255
(21) PCT/DE00/02855
(13) A1
(22) 22 Aug/août 2000 (22.08.2000)
(25) de (26) de
(30) 299 16 075.0 13 Sep/sep 1999
(13.09.1999)
DE
(43) 22 Mar/mar 2001 (22.03.2001)
(54) DEVICE FOR INSPECTING A
THREE-DIMENSIONAL
STRUCTURE
SURFACE
DISPOSITIF POUR INSPECTER UNE
STRUCTURE SUPERFICIELLE TRIDI-
MENSIONNELLE
(71) SIEMENS AKTIENGESELLSCHAFT
[DE/DE]; Wittelsbacherplatz 2, D-80333
München (DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) BELLM, Hubert [DE/DE]; Nibelungenring
6, D-76297 Stutensee-Blankenloch
(DE). KANT, Dieter [DE/DE]; Lärchenweg
3, D-76287 Rheinstetten (DE).
(74) SIEMENS AKTIENGESELLSCHAFT;
Postfach 22 16 34, D-80506 München (DE).
(81) CN JP KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
(51) 6 G01B 21/02
(11) WO 01/20256 (13) A1
(21) PCT/JP99/04944
(22) 10 Sep/sep 1999 (10.09.1999)
(25) ja (26) ja
(43) 22 Mar/mar 2001 (22.03.2001)
(54) DEVICE FOR MEASURING WIDTH
AND POSITION OF OBJECT
DISPOSITIF PERMETTANT DE MESU-
RER LA LARGEUR ET LA POSITION
D’UN OBJET
(71) TECHNOWAVE, LTD. [JP/JP]; 21, Honshio-cho,
Shinjuku-ku, Tokyo 160-0003 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) YOSHIDA, Takashi [JP/JP]; 3-1-901,
Shinmatsudo-Higashi, Matsudo-shi, Chiba
270-0033 (JP). KOMAZAWA, Yuichi
[JP/JP]; 1-17-10, Higashi-naeho 8-jou, Higashi-ku,
Sapporo-shi, Hokkaido 007-0808
(JP).
(74) IKUTA, Tetsuo et al. / etc.; Ikuta & Nakoshi
Law and Patent Office, Aoyama MS Building
7F., 7-5, Jingumae 3-chome, Shibuya-ku,
Tokyo 150-0001 (JP).
(81) CN JP KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
(51) 7 G01C
(11) WO 01/20257
(21) PCT/US00/25318
(13) A2
(22) 14 Sep/sep 2000 (14.09.2000)
(25) en (26) en
(30) 09/397,718 16 Sep/sep 1999
(16.09.1999)
US
(43) 22 Mar/mar 2001 (22.03.2001)
(54) HIGH Q ANGULAR RATE SENSING
GYROSCOPE
GYROSCOPE DE DETECTION DE
VITESSE ANGULAIRE DE QUALITE
ELEVEE
(71) WATSON INDUSTRIES, INC. [US/US];
3041 Melby Road, Eau Claire, WI 54703
(US).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) WATSON, William, S. [US/US]; 3026
Aspen Ct., Eau Claire, WI 54703 (US).