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Tech Hardware Supply Chain - Gazhoo

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Bhavin Shah<br />

(852) 2800-8538<br />

bhavin.a.shah@jpmorgan.com<br />

Wafer fab equipment<br />

category Function J.P. Morgan growth expectations Major players<br />

Chemical mechanical CMP equipment is used to planarize or flatten out the hills and valleys on a particular We expect the high cost of process-related consumables and increasing competition to Applied Materials<br />

polishing (CMP) film or layer after deposition. CMP equipment usage has grown significantly since its offset the modest growth from increasing interconnect layers and CMP applications, Ebara<br />

mainstream introduction in mid 1990s.<br />

keeping this equipment segment’s overall revenue growth below-average industry Novellus<br />

growth. Tokyo Seimitsu<br />

Electrochemical ECD equipment is used to deposit the copper metal that forms interconnects within a ECD equipment productivity increases at each new technology node, offsetting the Novellus<br />

deposition (ECD) semiconductor device.<br />

high growth rate of copper-based production and increased interconnect layers, limiting Semitool<br />

system unit growth and bringing this equipment segment’s overall growth in line with<br />

the industry.<br />

Applied Materials<br />

Ion Implant Ion implant equipment is used to “dope” or physically insert specific ions into the silicon Each new device generation requires incrementally more implants in order to tune Varian<br />

that is the basis for the gate structure.<br />

transistor performance. Additionally, the ongoing transition from multi-wafer processing Axcelis/SEN<br />

to single-wafer processing reduces system productivity, driving the need for more unit Nissin Electric<br />

shipments at each new technology node. We believe a combination of these factors is Applied Materials<br />

likely to drive Ion Implant revenue growth at a higher rate than the overall wafer fab<br />

equipment industry.<br />

ULVAC<br />

Epitaxial deposition Silicon epitaxial equipment is used to grow a high quality layer of silicon on the surface The development of silicon germanium (SiGe) for enhanced transistor performance in Applied Materials<br />

(Epi)<br />

of a wafer onto which the transistor structures will be built. By building the transistor advanced logic devices adds new applications for Epitaxial deposition. However, the ASM International<br />

structure on top of a previously deposited silicon germanium (SiGe) layer, the<br />

trend toward more complex system architectures with higher productivity is likely to LPE<br />

performance of the transistor can be significantly enhanced.<br />

negate the growth potential provided by this new SiGe application and cause this New Flare<br />

equipment segment to perform in line with the overall wafer fab equipment industry. <strong>Tech</strong>nologies<br />

Process control Process control equipment is one of the most diverse segments including equipment We expect that the continued introduction of new materials, more complex transistor KLA-Tencor<br />

for inspection, defect review and analysis, critical dimension measurement, and thin structures and lithography will require incrementally more process control steps and Hitachi High-<strong>Tech</strong><br />

film metrology.<br />

corresponding equipment at each new technology node in order to maintain acceptable Applied Materials<br />

yield levels. We believe these factors will drive process control revenue to outgrow the Nanometrics<br />

wafer fab equipment industry average. Vistec Semi Sys<br />

Manufacturing<br />

automation and<br />

control<br />

Source: J.P. Morgan.<br />

Asia Pacific Equity Research<br />

20 April 2009<br />

Factory automation and control encompass a very diverse segment, as it includes the<br />

equipment used to transfer, store, and sort both wafers and photo-masks within a fab<br />

and also includes the software needed to integrate and control equipment for the entire<br />

manufacturing process.<br />

As more semiconductor manufacturers build 300mm facilities, manufacturing<br />

automation/control adoption should outpace the overall wafer fab equipment industry in<br />

terms of unit growth. However, this is a highly competitive segment, and ASPs are<br />

expected to remain under severe pressure, causing it to grow below the overall<br />

Asyst <strong>Tech</strong><br />

Brooks Auto<br />

Daifuku<br />

IBM<br />

equipment average. Hewlett-Packard<br />

305

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