Untersuchungen zu Fabry-Pérot Filterfeldern - KOBRA - Universität ...
Untersuchungen zu Fabry-Pérot Filterfeldern - KOBRA - Universität ...
Untersuchungen zu Fabry-Pérot Filterfeldern - KOBRA - Universität ...
Erfolgreiche ePaper selbst erstellen
Machen Sie aus Ihren PDF Publikationen ein blätterbares Flipbook mit unserer einzigartigen Google optimierten e-Paper Software.
122<br />
Die SCIL-Technologie für <strong>zu</strong>künftige großflächige Prägungen, um die Herstellungskosten weiter<br />
<strong>zu</strong> senken<br />
[15]. van Patterson B., Zeghbroeck. Fabrication and analysis of Si/SiO2 micro-mechanical<br />
modulators. 1996, S. 25-26.<br />
[16]. Raley, N. F., et al. A <strong>Fabry</strong>-Perot microinterferometer for visible wavelengths. 1992, S.<br />
170-173.<br />
[17]. Aratani, K. Surface micromachined tuneable interferometer array. Sensors and<br />
Actuators. 1994, S. Vol. 43, No. 1/3 (1994),17.<br />
[18]. Tran, A. T. T. D. Surface Micromachined <strong>Fabry</strong>-Perot Tunable Filter. Institute of<br />
Electrical and Electronics Engineers. 1996, S. Vol. 8, No. 3 (1996),393-395.<br />
[19]. B., Correia, et al. Bulk-micromachined tunable <strong>Fabry</strong>-Perot microinterferometer for<br />
the visible spectral range. 1998, S. 287‐290.<br />
[20]. HAMAMATSU PHOTONICS K.K. Ultra-compact Mini-spectrometer integrating MEMS<br />
and image sensor technologies. [Online] 2009.<br />
[21]. Hasse, A. Wide continuous tuning range of 221 nm by InPair-gap vertical-cavity filters.<br />
Electronics letters. 2006, S. Vol. 42, No. 17 (2006),974.<br />
[22]. Irmer, S. Ultralow Biased Widely Continuously Tunable <strong>Fabry</strong>-Perot Filter. Institute of<br />
Electrical and Electronics Engineers. 2003, S. Vol. 15, No. 3 (2003),434-436.<br />
[23]. Kaushik, S. und Stallard, B. R. Two-dimensional array of optical interference filters<br />
produced by lithographic alterations of the index of refraction. 1995, S. 276-281.<br />
[24]. Correia, J. High-Selectivity Single-Chip Spectrometer for Operation at Visible<br />
Wavelengths. International Electron Devices Meeting. 1998, S. (1998),467-470.<br />
[25]. Wang, S. W. 128 channels of integrated filter array rapidly fabricated by using the<br />
combinatorial deposition technique. Applied physics. 2007, S. Vol. 88, No. 2 (2007),281-284.<br />
[26]. Chou, S. Y. Imprint Lithography with 25-Nanometer Resolution. 1996, S. No. 5258<br />
(1996),85-86.<br />
[27]. Ruchhoeft, P. Patterning curved surfacesTemplate generation byh ion beram<br />
proximity lithography and relief transfer by step and flash imprint lithography. 1999, S. Vol.<br />
17, No. 6 (1999),2965-2969.<br />
[28]. Resnick, D. J. Improved step and flash imprint lithography templates for<br />
nanofabrication. 2003, S. Vol. 69, No. 2-4 (2003),412-419.<br />
[29]. Ji, R. Nanoimprint nach dem SCIL-Prinzip. Mikroproduktion. 2009.<br />
[30]. Hillmer, H., et al. Optische Filter und Verfahren <strong>zu</strong> seiner Herstellung, sowie Vorrichtung<br />
<strong>zu</strong>r Untersuchung der spektralen und örtlichen Verteilung einer elektromagnetischen, von<br />
einem Gegenstand ausgehenden Strahlung. 2007/007075 2007.