Turbomolecular Pumps TURBOVAC and MAG - Granzow

Turbomolecular Pumps with Magnetic Rotor Suspension
Electronic Frequency Converters
TURBOTRONIK NT 340 MA
Technical Features
- For operating the TURBOVAC MAG
400 C/CT turbomolecular pump
- Compact control unit 1/2 19", 3 HU
- No batteries are required because
of integrated generator mode in
case of power failures
- Front panel with membrane keypad
and LCD
Advantages to the User
- Convenient control and monitoring
facilities
- Remote control and process control
via analog and programmable
control inputs and outputs
- Connection for backing pump,
venting valve and flange heater
- RS 232 C interface
- Temperature control for Aluminum
etching processes
b
b 1
b b 1 b 2 b 3 b 4
mm 219 211 109.5 198 202
in. 8.62 8.31 4.31 7.80 7.95
b
b 1
h 1
h3
d d 1
h
h h 1 h 2 h 3 h 4
mm 132.5 122.5 55 99 111
in. 5.22 4.82 0.20 3.90 4.37
h 1
h3
d d 1
h
h 2
b 2
b 3
b 4
l 4
l 3
l l 1 l 2 l 3 l 4
mm 316 4.5 130 326 3
in. 12.44 0.18 5.12 12.83 0.12
l 5 l 6 l 7 l 8
mm 12 55 38 105
in. 0.47 0.17 1.50 4.13
h 2
b 2
b 3
b 4
l 4
l 3
h 4
l 2
l 1
h 4
l 1
l
l 5
l 7 l 6
l 8
l 2
l
Dimensional drawing for the
TURBOTRONIK NT 340 MA
Dimensional drawing for the
TURBOTRONIK NT 340 MA
with TCU temperature control unit attached
C09 102 Oerlikon Leybold Vacuum Full Line Catalog