Turbomolecular Pumps TURBOVAC and MAG - Granzow

Use of Turbomolecular Pumps
in Analytical Instruments
All modern analytical methods for gas,
liquid and plasma analysis – like for
example GC-MS, LC-MS and ICP-MS
– rely on mass spectrometers and for
this reason require adequate highvacuum
conditions. Also in electron microscopes
and many surface analysis
instruments the production of a highvacuum
is essential.
In over 90 % of all highvacuum applications,
the turbomolecular pump has
been found to be ideal. Thanks to the
hydrocarbon-free vacuum, most simple
operation, compact design and almost
maintenance-free operation it has in
most cases displaced above all the
diffusion pump.
On the basis of decades of experience
and in cooperation with research facilities
and the manufacturers of analytical
instruments,
Oerlikon Leybold Vacuum has continually
optimized its products.
The new TURBOVAC wide range
series is a further innovative step
forward making available products
which are most flexible and reliable.
Owing to the modular concept the
user may
- adapt his vacuum system precisely
to his requirements
- perfectly integrate the components
within his system and
- find the most cost-effective system
configuration for his needs.
In combination with backing pumps
like the TRIVAC or Scroll pump,
Oerlikon Leybold Vacuum is able to
offer the best vacuum system optimized
for all major applications in the
area of analytical instrumentation.
Use of Turbomolecular Pumps
in the Area of Semiconductor
Processes
In the semiconductor industry turbomolecular
pumps are used on the
following processes, among others:
- Etching
- Sputtering
- Ion implantation
- CVD
- Lithography.
In these applications pumping of
aggressive gases is often required.
This may necessitate the use of pumps
equipped with a purge gas facility or a
magnetic suspension in order to avoid
damaged bearings. Especially during
metal etching, deposits may occur in
the fore-vacuum space of the turbomolecular
pump. In order to prevent
this the pumps must be heated to a
certain temperature. Such temperature
controlled variants are optionally available
for the MAG 1500 C, MAG 2000 C,
MAG 2800 and MAG 3200. In contrast
to turbomolecular pumps with mechanical
bearings, magnetically levitated
pumps provide the advantage that
they prevent overheating of the bearings
at high gas flows and effectively
exclude any damage to the magnetic
bearings by aggressive media.
In electron microscopes and in lithographic
equipment, low vibration levels
are exceptionally important. For this
reason magnetically levitated turbomolecular
pumps should be used here.
The recommended backing pumps are
either dry compressing ECODRY
pumps or rotary vane pumps from the
TRIVAC range, possibly fitted with the
BCS system.
Entire high vacuum equipment of a CD/DVD coating system with TURBOVAC TW 250 S pumps
C09 06
Oerlikon Leybold Vacuum Full Line Catalog