Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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Technical Data <strong>TURBOVAC</strong> TW 701<br />
Inlet flange<br />
DN<br />
160 ISO-K 160 CF<br />
Pumping speed<br />
N 2 I x s -1<br />
Ar I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Max. gas throughput<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
He mbar x I x s -1<br />
H 2 mbar x I x s -1<br />
Compression ratio<br />
N 2<br />
Ar<br />
He<br />
H 2<br />
680 680<br />
600 600<br />
530 530<br />
330 330<br />
12 12<br />
5 (water-cooled) 5 (water-cooled)<br />
7 7<br />
2.5 2.5<br />
8 x 10 8 8 x 10 8<br />
1 x 10 8 1 x 10 8<br />
1 x 10 6 1 x 10 6<br />
2 x 10 4 2 x 10 4<br />
Ultimate pressure<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
mbar (Torr)<br />
< 5.0 x 10 -9 (< 3.75 x 10 -9 ) < 1.5 x 10 -10 (< 1.1 x 10 -10 )<br />
14 (10.5) 14 (10.5)<br />
Recommended forevacuum pump<br />
TRIVAC D 65 B<br />
SCROLLVAC SC 30 D<br />
TRIVAC D 65 B<br />
SCROLLVAC SC 30 D<br />
Run-up time to 95% speed<br />
Purge port<br />
min<br />
DN<br />
≈ 5 ≈ 5<br />
16 KF 16 KF<br />
Cooling water connection<br />
2x G 1/8" (internal threads)<br />
2x G 1/8" (internal threads)<br />
Weight, approx.<br />
Supply voltage, nominal<br />
Max. power consumption<br />
kg (lbs)<br />
V DC<br />
W<br />
19 (42) 19 (42)<br />
59 59<br />
500 500<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
57 C09
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