Turbomolecular Pumps TURBOVAC and MAG - Granzow

Turbomolecular Pumps with Magnetic Rotor Suspension
without Compound Stage
TURBOVAC MAG 400 C/CT
Typical Applications
- All major semiconductor processes
such as Etch, CVD and Ion
Implantation
- Gas analysis systems
- Particle accelerators
- Electron beam microscopy
- Research instruments and systems
- Load locks and transfer chambers
ød
DN 100
A
E
Technical Features
- Magnetic suspension
h
C
B
F 1
D
h 1
h 3
F 2 h 2
h 4
h 5
E
F 3
60˚
b 1
F
B
a 1
60˚
a 2
D
a
Top view
b
- Patented KEPLA-COAT ® for rotor
and stator to prevent corrosion
- Low noise and vibration levels
- Installation in any orientation
- Optimized corrosion-resistant advanced
rotor design
- High temperature and high stress
tolerance material
a a 1 a 2 b b 1 d h h 1 h 2 h 3 h 4 h 5
mm 100 114 111 186 50 178 300 162 109 123 114 80
in. 3.94 4.49 4.37 7.32 1.97 7.01 11.81 6.38 4.29 4.84 4.49 3.15
- Temperature management system
(TMS) for etch application
Dimensional drawing for the TURBOVAC MAG 400 CT
1000
Advantages to the User
- Maintenance-free
- Optimized vacuum performance
Pumping Speed
I x s -1 H 2
100
10
8
6
4
2
N 2
- Resistant against corrosive gases
and process by-products
- Robust against shock-venting
- Temperature control for metal etch
- No deposition of etch by products
due to TMS
1
10 -4 2 4 6 8 10 -3 10 -2 10 -1 10
mbar
Inlet Pressure
Pumping speed of the TURBOVAC MAG 400 C/CT as a function of the inlet pressure
C09 74 Oerlikon Leybold Vacuum Full Line Catalog