Turbomolecular Pumps TURBOVAC and MAG - Granzow

with Compound Stage
Turbomolecular Pumps with Magnetic Rotor Suspension
Technical Data
Inlet flange
DN
TURBOVAC MAG
W 2200 C W 2200
200 ISO-F 250 ISO-F 250 CF
Pumping speed according to PNEUROP
N 2 I x s -1
Ar I x s -1
H 2 I x s -1
Speed min -1
Compression ratio
N 2
Ultimate pressure according to DIN 28 400
mbar (Torr)
1600 2000 2000
1450 1900 1900
1650 1800 1800
29 400 29 400 29 400
> 1 x 10 5 > 1 x 10 5 3.5 x 10 5
< 10 -8 (< 0.75 x 10 -8 ) < 10 -8 (< 0.75 x 10 -8 ) < 1 x 10 -10 (< 0.75 x 10 -10 )
Max. foreline pressure for N 2
with convection cooling
with water cooling
mbar (Torr)
mbar (Torr)
– – 0.1 (0.075)
2 (1.5) 2 (1.5) 1 (0.75)
Recommended forevacuum pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m 3 /h
Run-up time to 95% speed
forevacuum flange
min
DN
TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS
< 10 < 10 < 10
40 KF 40 KF 40 KF
Purge / vent port
Cooling water connection
(OD tube)
Weight, approx.
VCR nut
mm (in.)
kg (lbs)
1/4" 1/4" 1/4"
1/2" 1/2" 1/2"
48 (106) 48 (106) 60 (132.45)
10000
I · s -1 N 2
1000
Pumping Speed
100
10
8
6
4
He
H 2
2
1
10 -4
2 4 6 8
10 -3 10 -2 10 -1 mbar
Inlet Pressure
10
Pumping speed of the TURBOVAC MAG W 2200 C (DN 250) as a function of the inlet pressure
Oerlikon Leybold Vacuum Full Line Catalog
93 C09