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Turbomolecular Pumps TURBOVAC and MAG - Granzow

Turbomolecular Pumps TURBOVAC and MAG - Granzow

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with Compound Stage<br />

<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />

Technical Data<br />

<strong>TURBOVAC</strong> <strong>MAG</strong><br />

W 2000 C<br />

W 2000 CT<br />

Inlet flange<br />

DN<br />

250 ISO-F 250 ISO-F<br />

Pumping speed according to PNEUROP<br />

N 2 I x s -1<br />

He I x s -1<br />

H 2 I x s -1<br />

Speed min -1<br />

Compression ratio<br />

N 2<br />

Ultimate pressure according to DIN 28 400<br />

mbar (Torr)<br />

1650 1650<br />

1800 1800<br />

1720 1720<br />

28 800 28 800<br />

> 10 8 > 10 8<br />

< 10 -8 (< 0.75 x 10 -8 ) < 10 -8 (< 0.75 x 10 -8 )<br />

Max. foreline pressure for N 2<br />

mbar (Torr)<br />

3.5 (2.63) 3.5 (2.63)<br />

Recommended forevacuum pump<br />

Rotary vane pump<br />

or dry compressing pump<br />

offering a pumping speed of 100 m 3 /h<br />

TRIVAC D 65 BCS<br />

TRIVAC D 65 BCS<br />

Run-up time<br />

forevacuum flange<br />

Purge / vent port<br />

Cooling water connection<br />

(OD tube)<br />

Weight, approx.<br />

min<br />

DN<br />

VCR nut<br />

mm (in.)<br />

kg (lbs)<br />

< 8 < 8<br />

40 KF 40 KF<br />

1/4" 1/4"<br />

6,4 (0.25) 6.4 (0.25)<br />

62 (137) 62 (137)<br />

Ordering Information<br />

<strong>TURBOVAC</strong> <strong>MAG</strong><br />

W 2000 C<br />

W 2000 CT<br />

<strong>TURBOVAC</strong> <strong>MAG</strong> turbomolecular pump<br />

Part No. 894 17 Part No. 894 31<br />

Electronic frequency converter<br />

<strong>MAG</strong>.DRIVE 2000<br />

Part No. 400034V0011<br />

Part No. 400034V0011<br />

Plug-in control<br />

Connecting cable converter – pump<br />

01.5 m (5.25 ft) BEARING<br />

01.5 m (5.25 ft) DRIVE/TMS<br />

05.0 m (17.5 ft) BEARING<br />

05.0 m (17.5 ft) DRIVE/TMS<br />

10.0 m (35.0 ft) BEARING<br />

10.0 m (35.0 ft) DRIVE/TMS<br />

20.0 m (70.0 ft) BEARING<br />

20.0 m (70.0 ft) DRIVE/TMS<br />

Part No. 121 36 Part No. 121 36<br />

Part No. 121 29 Part No. 121 29<br />

Part No. 121 30 Part No. 121 30<br />

Part No. 121 19 Part No. 121 19<br />

Part No. 121 20 Part No. 121 20<br />

Part No. 121 21 Part No. 121 21<br />

Part No. 121 22 Part No. 121 22<br />

Part No. 121 21 Part No. 121 21<br />

Part No. 121 26 Part No. 121 26<br />

Oerlikon Leybold Vacuum Full Line Catalog<br />

91<br />

C09

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