Turbomolecular Pumps TURBOVAC and MAG - Granzow

TURBOVAC TW 701
Typical Applications
- Mass spectrometers
- Data storage
- Flat panel displays
- R & D, e.g.
- UHV systems
- Particle accelerators
- Load locks and transfer chambers
ø d 1
ød l 1
h 1
l
Technical Features
- Integrated frequency converter
- Operation in any orientation
h 2
h 3
b 1
h
ø d 2
Top view
b b 1 d d 1 d 2 h h 1 h 2 h 3 l l 1
DN160 ISO-K mm 228 219 180 150 180 – – 285 115 264 223
in. 8.98 8.82 7.09 5.91 7.09 – – 11.22 4.53 10.39 8.78
DN 160 CF mm 228 219 – 150 180 295 12 – 115 264 223
in. 8.98 8.82 – 5.91 7.09 11.61 0.47 – 4.53 10.39 8.78
b
- Highest pumping speed and
throughput für Nitrogen und Argon
- High foreline tolerance allows the
use of down-sized forevacuum
pumps
- Highly effective air-cooling unit
- Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Dimensional drawing for the TURBOVAC TW 701
10 -5 10 -4 10 -3 10 -2 10 -1 Torr
10 0
10 4
I x s -1
Pumping Speed
10 3
10 2
10 1
N 2
Ar
He
H 2
750
Advantages to the User
- Space-saving
- Easy to integrate into complex
vacuum systems
- High productivity
- Low operating costs
- Highly reliable operation
10 0
10 -5 10 -4 10 -3 10 -2 10 -1 1 mbar 10
Inlet Pressure
Pumping speed as a function of the inlet pressure
C09 56
Oerlikon Leybold Vacuum Full Line Catalog