Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical Rotor Suspension<br />
Technical Data<br />
<strong>TURBOVAC</strong> 1000 C<br />
Inlet flange<br />
DN<br />
160 ISO-K • 160 CF 200 ISO-K • 200 CF 250 ISO-K<br />
Pumping speed<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Compression ratio<br />
N 2<br />
He<br />
H 2<br />
850 1100 1150<br />
880 975 1000<br />
900 970 1000<br />
> 10 9 > 10 9 > 10 9<br />
5 x 10 4 5 x 10 4 5 x 10 4<br />
2 x 10 3 2 x 10 3 2 x 10 3<br />
Ultimate pressure to DIN 28 400<br />
Speed<br />
mbar<br />
(Torr)<br />
min -1 (rpm)<br />
< 10 -10 < 10 -10 < 10 -10<br />
(< 0.75 x 10 -10 ) (< 0.75 x 10 -10 ) (< 0.75 x 10 -10 )<br />
36.000 36.000 36.000<br />
Run-up time (frequency converter)<br />
Run-up time NT 20, approx.<br />
Type of bearing<br />
Type of lubrication<br />
Installation orientation<br />
Cooling<br />
Weight, approx.<br />
Recommended backing pump<br />
for st<strong>and</strong>ard operation<br />
for purge gas operation<br />
min<br />
min<br />
kg (lbs)<br />
TRIVAC<br />
TRIVAC<br />
4 4 4<br />
9 9 9<br />
Hybrid ceramic ball bearings Hybrid ceramic ball bearings Hybrid ceramic ball bearings<br />
Grease Grease Grease<br />
Any Any Any<br />
Water (air) Water (air) Water (air)<br />
25 (55.1) 25 (55.1) 25 (55.1)<br />
D 25 B / D 40 B D 25 B / D 40 B D 25 B / D 40 B<br />
D 40 B / D 65 B D 40 B / D 65 B D 40 B / D 65 B<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
31 C09
Change language