Turbomolecular Pumps TURBOVAC and MAG - Granzow

with Compound Stage
Turbomolecular Pumps with Mechanical Rotor Suspension
Technical Data
TURBOVAC TW 300 H
Inlet flange
DN
O-ring sealed
Metal sealed
100 ISO-K 100 CF
Pump housing
Aluminum
Stainless steel
Pumping speed at 10 -5 / 10 -3 mbar
N 2 I x s -1
Ar I x s -1
H 2 I x s -1
He I x s -1
Ultimate pressure (for CF pumps)
with two-stage oil-sealed
rotary vane vacuum pump
TRIVAC D 2,5 E
mbar (Torr)
with dry compressing
scroll vacuum pump
SCROLLVAC SC 15 D mbar (Torr)
with diaphragm pump
DIVAC 2.5 VT
mbar (Torr)
240 / 240 240 / 240
240 / 240 240 / 240
160 / 140 160 / 140
240 / 230 240 / 230
< 1 x 10 -8 (< 0.75 x 10 -8 ) < 1 x 10 -10 (< 0.75 x 10 -10 )
< 1 x 10 -9 (< 0.75 x 10 -9 )
< 1 x 10 -9 (< 0.75 x 10 -9 )
Max. foreline pressure for N 2
mbar (Torr)
< 10 (water-cooled) < 5 (air-cooled)
Recommended forevacuum pump
two-stage oil-sealed
rotary vane vacuum pump
dry compressing scroll vacuum pump
TRIVAC D 2,5 E
SCROLLVAC SC 15 D
TRIVAC D 2,5 E
SCROLLVAC SC 15 D
Run-up time to 95%
of nominal speed
Purge / vent port
Cooling water connection (option)
Weight, approx. with / without
frequency converter
Supply voltage
Max. power consumption
Run up / ultimate pressure
min
DN
kg (lbs)
V DC
W
4 4
16 KF 16 KF
2x G 1/8" 2x G 1/8"
6.8 (15.0) / 6.0 (13.2) 6.8 (15.0) / 6.0 (13.2)
24 24
150 / 30 150 / 30
Oerlikon Leybold Vacuum Full Line Catalog
53 C09