Turbomolecular Pumps TURBOVAC and MAG - Granzow

Turbomolecular Pumps with Mechanical Rotor Suspension
TURBOVAC 600 C
ClassicLine
without Compound Stage
Typical Applications
- Load locks and transfer chambers
- Optical coating
- Flat panel displays
- R & D
DN
A
134 a
Top view
124,5
124,7 b 1
h 4
* drawn offset by 45°
d225
178 b
C*
90°
F
B
h
D*
E
175 h 1
124,5 b
E B
105
97 116 D 2
h
h 2
5 h DN
3
A
28
a 1
C
E
Technical Features
- Compact design
- Operation in any orientation
- Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
DN h h 1 h 2 h 3 h 4 h 5 a a 1 b b 1 b 2 l d
160 ISO-K mm 317 175 116 97 28 105 134 124.5 178 124.7 124.5 225
in. 12.48 6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90 8.86
160 CF mm 323 175 116 97 28 105 134 124.5 178 124.7 124.5 225
in. 12.72 6.89 4.57 3.82 1.10 4.13 5.28 4.90 7.01 4.91 4.90 8.86
Dimensional drawing for the TURBOVAC 600 C
Advantages to the User
Pumping speed
1000
600
500
l x s -1
200
100
He
H 2
N 2
Ar
- Installation in any orientation
- Highly reliable due to hybrid ceramic
ball bearings
- Life time lubrication and
maintenance-free
- Option: Purge gas facility
10
2
-6
10
4 6
8
-5
10
-4 -3
10 10
Pressure
-2 -1
10 mbar10
Pumping speed for different gases as a function of intake pressure
(TURBOVAC 600 C with flange DN 160 ISO-K)
C09 26 Oerlikon Leybold Vacuum Full Line Catalog