Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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with Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Technical Data<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> W 1500 CT<br />
Inlet flange<br />
DN<br />
200 ISO-F 250 ISO-F 200 CF<br />
Pumping speed according to PNEUROP<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Speed min -1<br />
Compression ratio<br />
N 2<br />
Ultimate pressure according to DIN 28 400<br />
mbar (Torr)<br />
1100 1220 1100<br />
1150 1220 1150<br />
920 1020 920<br />
36 000 36 000 36 000<br />
> 10 8 > 10 8 > 10 8<br />
< 10 -8 < 10 -8 < 10 -10<br />
(< 0.7 x 10 -8 ) (< 0.7 x 10 -8 ) (< 0.7 x 10 -8 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
2.6 (1.95) 2.6 (1.95) 2.6 (1.95)<br />
Recommended forevacuum pump<br />
Rotary vane pump<br />
or dry compressing pump<br />
offering a pumping speed of 100 m 3 /h<br />
Run-up time to 95% speed<br />
forevacuum flange<br />
min<br />
DN<br />
TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS<br />
< 6 < 6 < 6<br />
40 KF 40 KF 40 KF<br />
Purge / vent port<br />
VCR nut<br />
1/4" 1/4" 1/4"<br />
Cooling water connection, hose nipple<br />
(OD tube)<br />
mm (in.)<br />
6.4 (0.25) 6.4 (0.25) 6.4 (0.25)<br />
Weight, approx.<br />
kg (lbs)<br />
32 (70.6) 32 (70.6) 32 (70.6)<br />
10000<br />
I x s -1<br />
Pumping Speed<br />
1000<br />
100<br />
10<br />
8<br />
6<br />
4<br />
N2<br />
He<br />
H2<br />
2<br />
1<br />
10 -4<br />
2 4 6 8<br />
10 -3 10 -2 10 -1 mbar<br />
Inlet Pressure<br />
10<br />
Pumping speed of the <strong>TURBOVAC</strong> <strong>MAG</strong> W 1500 CT (DN 250) as a function of the inlet pressure<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
87 C09
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