Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical<br />
Rotor Suspension with Compound Stage<br />
<strong>TURBOVAC</strong> TW 70 H<br />
Typical Applications<br />
- Mass spectrometers<br />
- Electron beam microscopy<br />
- Leak detectors<br />
- R & D, e.g.<br />
- UHV systems<br />
- Load locks <strong>and</strong> transfer chambers<br />
ød<br />
ø d<br />
1<br />
h 1<br />
h<br />
26°<br />
26°<br />
Top view<br />
DN a h h 1 d d 1<br />
63 ISO-K mm 111 145 22 95 95<br />
in. 4.37 5.71 0.87 3.74 3.74<br />
63 CF mm 111 169 22 113.5 95<br />
in. 4.37 6.65 0.87 4.47 3.74<br />
a<br />
Technical Features<br />
- Integrated or external frequency converter<br />
- Compact design<br />
- Operation in any orientation<br />
- High foreline tolerance<br />
- Oil-free pump for generating clean<br />
high <strong>and</strong> ultrahigh vacuum<br />
conditions<br />
Dimensional drawing for the <strong>TURBOVAC</strong> TW 70 H<br />
Pumping speed<br />
10 3<br />
10 2<br />
10 1<br />
10 -5 10 -4 10 -3 10 -2 10 -1 10 0 Torr<br />
N 2<br />
Ar<br />
He<br />
H 2<br />
Advantages to the User<br />
- Space-saving<br />
- Easy to integrate into complex<br />
vacuum systems<br />
- Allows the use of down-sized<br />
forevacuum pumps<br />
- Low operating costs<br />
- Highly reliable operation<br />
I x s -1 2 8<br />
10 0<br />
4 6<br />
10 -5 10 -4 10 -3 10 -2 10 -1 10 0 mbar 10 1<br />
Inlet Pressure<br />
Pumping speed as a function of the inlet pressure<br />
C09 40<br />
Oerlikon Leybold Vacuum Full Line Catalog
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