Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Technical Data<br />
Inlet flange<br />
DN<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
400 C 400 CT<br />
100 ISO-K 100 ISO-K<br />
Pumping speed according to PNEUROP<br />
N 2 I x s -1<br />
H 2 I x s -1<br />
Speed (high / low) min -1<br />
Compression ratio<br />
N 2<br />
H 2<br />
Ultimate pressure according to DIN 28 400<br />
mbar (Torr)<br />
240 1) 240 1)<br />
180 1) 174 1)<br />
51600 / 43 860 51600 / 43 860<br />
2 x 10 6 2 x 10 6<br />
5 x 10 2 5 x 10 2<br />
< 10 -9 (< 0.75 x 10 -9 ) < 10 -9 (< 0.75 x 10 -9 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
5 x 10 -1 (3.75 x 10 -1 ) 5 x 10 -1 (3.75 x 10 -1 )<br />
Recommended forevacuum pump<br />
TRIVAC D 65 BCS<br />
Scroll<br />
TRIVAC D 65 BCS<br />
Scroll<br />
Run-up time to 95% speed<br />
forevacuum flange<br />
Purge / vent port<br />
Cooling water connections<br />
(hose nipple)<br />
Weight, approx.<br />
min<br />
DN<br />
DN<br />
mm (in.)<br />
kg (lbs)<br />
3.5 3.5<br />
25 KF 25 KF<br />
10 KF 10 KF<br />
7.5 (0.30) 7.5 (0.30)<br />
16 (35) 16 (35)<br />
Ordering Information<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
400 C 400 CT<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> turbomolecular pump<br />
Part No. 894 62 Part No. 894 63<br />
1) Applies at a speed of 51 600 min -1<br />
Electronic frequency converter<br />
TURBOTRONIK NT 340 MA (120 V)<br />
Part No. 857 32 Part No. 857 32<br />
Connection line motor, 3 m (10.5 ft)<br />
Part No. 859 10 Part No. 859 10<br />
Connection line bearing, 3 m (10.5 ft)<br />
Part No. 859 11 Part No. 859 11<br />
Accessories for the temperature control<br />
– see TURBOTRONIK<br />
Purge gas <strong>and</strong> venting valve<br />
110 V, 50/60 Hz<br />
Part No. 855 48 Part No. 855 48<br />
230 V, 50/60 Hz<br />
Part No. 855 49 Part No. 855 49<br />
024 V DC, 5 W<br />
Part No. 174 17 Part No. 174 17<br />
Seal kit<br />
Part No. 200 91 240 Part No. 200 91 240<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
75<br />
C09
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