Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical Rotor Suspension<br />
Technical Data <strong>TURBOVAC</strong> 50<br />
Inlet flange<br />
DN<br />
O-ring sealed<br />
O-ring sealed<br />
40 KF • 40 CF 63 ISO-K • 63 CF<br />
Pump housing<br />
Aluminum<br />
Aluminum<br />
Pumping speed at 10 -3 mbar<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Max. gas throughput 1) at 10 -2 mbar<br />
N 2 mbar x I x s -1<br />
He mbar x I x s -1<br />
H 2 mbar x I x s -1<br />
Max. compression when idle<br />
N 2<br />
Ultimate pressure with TRIVAC D 2,5 E<br />
mbar (Torr)<br />
33 55<br />
36 48<br />
28 30<br />
0.30 0.40<br />
0.25 0.35<br />
0.20 0.25<br />
2 · 10 6 2 · 10 6<br />
< 5 x 10 -8 (< 3.75 x 10 -8 ) < 5 x 10 -8 (< 3.75 x 10 -8 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
1 x 10 -1 (< 0.75 x 10 -1 ) 1 x 10 -1 (< 0.75 x 10 -1 )<br />
Recommended forevacuum pump<br />
TRIVAC D 2,5 E<br />
TRIVAC D 2,5 E<br />
Run-up time<br />
to 95% of nominal speed<br />
min<br />
2 2<br />
Cooling water connection (hose nozzles)<br />
(for Part No. 854 08)<br />
mm (in.)<br />
10 10<br />
Weight, approx.<br />
Max. power consumption<br />
kg<br />
VA<br />
2 2<br />
45 45<br />
1) for continuous operation when water-cooled<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
15 C09
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