Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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Accessories<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Flange Heaters for CF<br />
Highvacuum Flanges<br />
Most <strong>TURBOVAC</strong> pumps can be<br />
baked out in order to improve the<br />
ultimate pressure attained in the UHV<br />
range. Degassing of the turbomolecular<br />
pump will only be useful<br />
when simultaneously baking out the<br />
vacuum chamber.<br />
Technical Data<br />
Rated power consumption of<br />
the flange heater<br />
DN 063 CF, DN 100 CF<br />
DN 160 CF<br />
Ordering Information<br />
Flange heater<br />
DN 063 CF<br />
DN 100 CF<br />
DN 160 CF<br />
W<br />
W<br />
Flange Heater<br />
100<br />
150<br />
Flange Heater<br />
230 V 110 V<br />
Part No. 854 04 Part No. 854 07<br />
Part No. 854 27 Part No. 854 28<br />
Part No. 854 37 Part No. 854 38<br />
Fine Filter<br />
A fine filter integrated in the centering<br />
ring protects the pump against<br />
particles <strong>and</strong> dust on the highvacuum<br />
side.<br />
Ordering Information<br />
Connection flange of the fine filter<br />
DN 040 KF<br />
DN 063 ISO-K<br />
DN 100 ISO-K<br />
Fine Filter<br />
Part No. 883 98<br />
Part No. 887 20<br />
Part No. 887 21<br />
The following accessories are also<br />
available:<br />
Vacuum gauge COMBIVAC 2T<br />
Part No. 230 000<br />
(see Product Section C16)<br />
Delayed venting unit<br />
Part No. 500 441<br />
(see Product Section C10)<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
109<br />
C09
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