Turbomolecular Pumps TURBOVAC and MAG - Granzow

TURBOVAC TW 1600
Typical Applications
- Data storage
- Flat panel displays
- Optical coating
- Large area coating
- R & D, e.g.
- Fusions-Experimente
- Space simulation
- UHV applications
ø d
b
b1
Technical Features
- Frequency converter and power
supply integrated
h
h 3
h 2
h 1
h 4
- Robust rotor design
- Operation in any orientation
a
- Highest pumping speed and
throughput
ø d 1
57°
61,5°
Top view
- Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
DN a a b b 1 d d 1 h h 1 h 2 h 3 h 4
200 ISO-F mm 15° 178 190 156 285 308 425 349 315 277 256
inch 15° 7.01 7.48 6.14 11.22 12.13 16.73 13.74 12.40 10.91 10.08
250 ISO-F mm 15° 178 190 156 335 308 398 322 288 249 228
inch 15° 7.01 7.48 6.14 13.19 12.13 15.67 12.68 11.34 9.80 8.98
250 CF mm 5.6° 178 190 156 304 308 413 337 303 264 243
inch 5.6° 7.01 7.48 6.14 11.97 12.13 16.26 13.27 11.93 10.39 9.57
- Purge gas and venting valve
integrated
- High foreline tolerance
Dimensional drawing for the TURBOVAC TW 1600
10 4
I x s -1 N 2
Ar
10 3
10 2 8
6
4
2
10 1 10 -5 2 4 6 8
10 -4 10 -3 10 -2 10 -1 1
10
mbar
Inlet Pressure
Pumping Speed
10 -5 10 -4 10 -2 10 -1 Torr
10 -3
1 10
Advantages to the User
- Space-saving
- Easy to integrate into complex
vacuum systems
- High productivity
- Low operating costs
- Operation with dry backing pumps
Pumping speed as a function of the inlet pressure
C09 60
Oerlikon Leybold Vacuum Full Line Catalog