Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Technical Data<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
Inlet flange<br />
DN<br />
2000 C 2000 CT<br />
250 ISO-F 250 ISO-F<br />
Pumping speed according to PNEUROP<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Speed min -1<br />
Compression ratio<br />
N 2<br />
Ultimate pressure according to DIN 28 400<br />
mbar (Torr)<br />
1550 1550<br />
1780 1780<br />
1390 1390<br />
28 800 28 800<br />
> 10 8 > 10 8<br />
< 10 -8 (< 0.75 x 10 -8 ) < 10 -8 (< 0.75 x 10 -8 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
1.6 (1.2) 1.6 (1.2)<br />
Recommended forevacuum pump<br />
Rotary vane pump<br />
or dry compressing pump offering<br />
a pumping speed of 100 m 3 /h<br />
TRIVAC D 65 BCS<br />
TRIVAC D 65 BCS<br />
Run-up time<br />
forevacuum flange<br />
Purge / vent port<br />
Cooling water connection<br />
(OD tube)<br />
Weight, approx.<br />
min<br />
DN<br />
VCR nut<br />
mm (in.)<br />
kg (lbs)<br />
< 8 < 8<br />
40 KF 40 KF<br />
1/4" 1/4"<br />
6.4 (0.25) 6.4 (0.25)<br />
68 (150) 68 (150)<br />
Ordering Information<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
2000 C 2000 CT<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> turbomolecular pump<br />
Part No. 894 16 Part No. 894 30<br />
Electronic frequency converter<br />
<strong>MAG</strong>.DRIVE 2000<br />
Part No. 400034V0011<br />
Part No. 400034V0011<br />
Plug-in control<br />
Connecting cables converter – pump<br />
01.5 m (5.25 ft) BEARING<br />
01.5 m (5.25 ft) DRIVE/TMS<br />
05.0 m (17.5 ft) BEARING<br />
05.0 m (17.5 ft) DRIVE/TMS<br />
10.0 m (35.0 ft) BEARING<br />
10.0 m (35.0 ft) DRIVE/TMS<br />
20.0 m (70.0 ft) BEARING<br />
20.0 m (70.0 ft) DRIVE/TMS<br />
Seal kit<br />
DN 250<br />
Part No. 121 36 Part No. 121 36<br />
Part No. 121 29 Part No. 121 29<br />
Part No. 121 30 Part No. 121 30<br />
Part No. 121 19 Part No. 121 19<br />
Part No. 121 20 Part No. 121 20<br />
Part No. 121 21 Part No. 121 21<br />
Part No. 121 22 Part No. 121 22<br />
Part No. 121 25 Part No. 121 25<br />
Part No. 121 26 Part No. 121 26<br />
Part No. 200 91 641 Part No. 200 91 641<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
81<br />
C09
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