Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical Rotor Suspension<br />
Technical Data<br />
<strong>TURBOVAC</strong> 600 C<br />
Inlet flange<br />
DN<br />
160 ISO-K • 160 CF<br />
Pumping speed<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Max. gas throughput<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
Compression ratio<br />
N 2<br />
He<br />
H 2<br />
560<br />
600<br />
570<br />
< 4<br />
< 4<br />
> 10 9<br />
2 x 10 4<br />
1.1 x 10 3<br />
Ultimate pressure<br />
mbar (Torr)<br />
< 10 -10 (< 10 -10 )<br />
Speed min -1<br />
36 000<br />
Run-up time<br />
(frequency converter), approx.<br />
Max. continuous inlet pressure 1)<br />
(continuous)<br />
min<br />
mbar (Torr)<br />
4<br />
1 x 10 -2 (0.75 x 10 -2 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
1 x 10 -1 (0.75 x 10 -1 )<br />
Recommended forevacuum pump<br />
for st<strong>and</strong>ard operation<br />
for purge gas operation<br />
Run-up time to 95% speed<br />
Purge / vent port<br />
Cooling water connection<br />
(hose nozzles)<br />
Weight, approx.<br />
Max. power consumption<br />
at ultimate pressure<br />
min<br />
DN<br />
mm (in.)<br />
kg (lbs)<br />
VA<br />
VA<br />
TRIVAC D 25 B / 40 B<br />
TRIVAC 40 B<br />
3<br />
10 KF<br />
10 (0.39)<br />
17 (37.5)<br />
680<br />
480<br />
1) Water-cooled<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
27 C09
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