Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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Technical Data<br />
<strong>TURBOVAC</strong> 250 S<br />
Inlet flange<br />
DN<br />
100 ISO-K / 100 CF<br />
Pumping speed at 10 -5 mbar<br />
N 2 I x s -1<br />
Ar I x s -1<br />
H 2 I x s -1<br />
He I x s -1<br />
Max. gas throughput, max.<br />
N 2<br />
Ar<br />
H 2<br />
He<br />
Compression ratio<br />
N 2<br />
Ar<br />
H 2<br />
He<br />
Ultimate pressure with two-stage oil-sealed<br />
rotary vane pump<br />
mbar (Torr)<br />
230<br />
210<br />
80<br />
150<br />
3.7 mbar x l x s -1 at 10 -1 mbar<br />
1.6 mbar x l x s -1 at 10 -2 mbar<br />
1.1 mbar x l x s -1 at 10 -1 mbar<br />
2.4 mbar x l x s -1 at 10 -1 mbar<br />
3.0 x 10 7 at 3 mbar<br />
1.0 x 10 7 at 6 mbar<br />
5.0 x 10 2 at 0.2 mbar<br />
3.2 x 10 3 at 0.7 mbar<br />
< 2 x 10 -8 (< 1.5 x 10 -2 )<br />
Max. permissible backing pressure for N 2<br />
mbar (Torr)<br />
3 (2.25)<br />
Operating speed<br />
Run-up time, approx.<br />
Forevacuum connection<br />
Venting connection<br />
Weight<br />
without frequency converter<br />
with frequency converter<br />
min -1 (rpm)<br />
min<br />
kg (lbs)<br />
kg (lbs)<br />
51.600<br />
3<br />
DN 16 KF<br />
Thread M 5<br />
5.0 (11.0)<br />
5.8 (12.6)<br />
Recommended forevacuum pumps<br />
TRIVAC<br />
Diaphragm pump<br />
with an ultimate pressure < 3 mbar<br />
<strong>and</strong> a pumping speed at 3 mbar<br />
TRIVAC (at purge gas operation)<br />
D 2.5 E<br />
upon request<br />
D 8 B<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
45 C09
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