Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Electronic Frequency Converters<br />
<strong>MAG</strong>.DRIVE digital<br />
<strong>MAG</strong>.DRIVE digital without plug-in control<br />
<strong>MAG</strong>.DRIVE digital with plug-in control<br />
Advantages to the User<br />
- Operation of turbomolecular pumps<br />
with magnetically levitated rotors:<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> W 830/1300 C,<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> W 1500 C/CT,<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> W 2200 C <strong>and</strong><br />
<strong>TURBOVAC</strong> <strong>MAG</strong> W 2800/3200 C/CT<br />
- Easy operation through the controls<br />
or the use of plug-in control unit<br />
- Communication to host computer of<br />
the customer via serial interface <strong>and</strong><br />
conventional interface possible<br />
- Setting of speed, temperature of the<br />
basic flange <strong>and</strong> other functions<br />
- Warning in case the pump is running<br />
out of specification<br />
- Storing of all parameters in the<br />
pump’s memory<br />
- Plug-in control<br />
- Small size <strong>and</strong> low weight<br />
- Integrated fan<br />
- Integrated temperature management<br />
system magnetic bearing<br />
control system<br />
b b 1 d h h 1 h 2 h 3 l l 1 l 2 l 3<br />
mm 213 198 3.3 113 135 128 122.4 455 27 100 70<br />
in. 8.39 7.80 0.13 4.45 5.31 5.04 4.82 17.91 1.06 3.94 2.76<br />
b<br />
40°<br />
h 1<br />
l 1<br />
h 2<br />
h<br />
l<br />
l 3<br />
l 2<br />
ød<br />
h 3<br />
b 1<br />
Dimensional drawing for the <strong>MAG</strong>.DRIVE digital<br />
0°<br />
0°<br />
270°<br />
90°<br />
270°<br />
90°<br />
225°<br />
180°<br />
Connection<br />
DRIVE/BEARING<br />
Connection<br />
TMS<br />
180°<br />
Overview connection lines<br />
C09 106 Oerlikon Leybold Vacuum Full Line Catalog