Turbomolecular Pumps TURBOVAC and MAG - Granzow

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Turbomolecular Pumps with Magnetic Rotor Suspension without Compound Stage TURBOVAC 340 M Typical Applications - Gas analysis systems - Particle accelerators - Electron beam microscopy - Research instruments and systems ød DN 100 A 60° B C F b1 Technical Features - Magnetic suspension - Absolutely free of any lubricants h4 h5 h6 B E C F1 F2 h3 F3 h2 h a1 ød1 60° E D a Top view b - Low noise and vibration levels - Installation in any orientation - Convection cooling - Purge gas design h1 DN a a 1 b b 1 d d 1 h h 1 h 2 h 3 h 4 h 5 h 6 100 ISO-K mm 99 101 101 50 178 28 311 12 162 109 123 114 80 in. 3.90 3.98 3.98 1.97 7.01 1.10 12.24 0.47 6.38 4.29 4.84 4.49 3.15 100 CF mm 99 101 101 50 178 28 322 12 162 109 123 114 80 in. 3.90 3.98 3.98 1.97 7.01 1.10 12.24 0.47 6.38 4.29 4.84 4.49 3.15 160 ISO-K mm 99 101 101 50 178 28 311 12 162 109 123 114 80 in. 3.90 3.98 3.98 1.97 7.01 1.10 12.24 0.47 6.38 4.29 4.84 4.49 3.15 160 CF mm 99 101 101 50 178 28 308 12 162 109 123 114 80 in. 3.90 3.98 3.98 1.97 7.01 1.10 12.13 0.47 6.38 4.29 4.84 4.49 3.15 Dimensional drawing for the TURBOVAC 340 M Pumping Speed 10 3 10 2 8 6 4 Torr 10 -6 10 -5 10 -4 10 -3 10 -2 0.075 Advantages to the User - Maintenance-free - No batteries are required because of integrated generator mode in case of power I x s -1 H 2 2 10 1 10 -6 2 4 6 8 10 -5 N 2 10 -4 10 -3 10 -2 mbar 10 -1 Inlet Pressure Pumping speed of the TURBOVAC 340 M (100 and 160 ISO-K/CF) as a function of the inlet pressure C09 72 Oerlikon Leybold Vacuum Full Line Catalog
without Compound Stage Turbomolecular Pumps with Magnetic Rotor Suspension Technical Data TURBOVAC 340 M Inlet flange DN 100 ISO-K • 100 CF 160 ISO-K • 160 CF Pumping speed N 2 I x s -1 H 2 I x s -1 Speed min -1 Compression ratio N 2 He H 2 240 320 270 370 51600 51600 1 x 10 7 1 x 10 7 6.4 x 10 4 6.4 x 10 4 1 x 10 3 1 x 10 3 Ultimate pressure Max. foreline pressure for N 2 mbar (Torr) mbar (Torr) < 10 -9 (< 0.75 x 10 -9 ) < 10 -9 (< 0.75 x 10 -9 ) 5 x 10 -1 (3.75 x 10 -1 ) 5 x 10 -1 (3.75 x 10 -1 ) Recommended forevacuum pump TRIVAC D 16 B Scroll TRIVAC D 16 B Scroll Run-up time forevacuum flange Purge / vent port min DN DN 3.5 3.5 25 KF 25 KF 10 KF 10 KF Cooling water connections (hose nipple) not required not required Weight, approx. kg (lbs) 16 (35) 16 (35) Ordering Information TURBOVAC 340 M TURBOVAC turbomolecular pump with highvacuum connection flange DN 100 ISO-K DN 100 CF DN 160 ISO-K DN 160 CF Accessories for all pumps Flange heater DN 100 CF, 230 V DN 160 CF, 230 V DN 160 CF, 110 V Electronic frequency converter TURBOTRONIK NT 340 M 100 V 120 V 230 V Connection line Part No. 855 80 Part No. 855 81 Part No. 855 82 Part No. 855 83 Part No. 854 27 Part No. 854 37 Part No. 854 38 Part No. 857 31 Part No. 857 30 Part No. 857 29 see TURBOTRONIK NT 340 M Oerlikon Leybold Vacuum Full Line Catalog 73 C09
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