Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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without Compound Stage<br />
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
Technical Data<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> 1500 CT<br />
Inlet flange<br />
DN<br />
200 ISO-F 250 ISO-F<br />
Pumping speed according to PNEUROP<br />
N 2 I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Speed min -1<br />
Compression ratio<br />
N 2<br />
Ultimate pressure according to DIN 28 400<br />
mbar (Torr)<br />
1100 1220<br />
1150 1220<br />
920 1020<br />
36 000 36 000<br />
> 10 8 > 10 8<br />
< 10 -8 (< 0.75 x 10 -8 ) < 10 -8 (< 0.75 x 10 -8 )<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
1.7 (1.2) 1.7 (1.2)<br />
Recommended forevacuum pump<br />
Rotary vane pump<br />
or dry compressing pump<br />
offering a pumping speed of 100 m 3 /h<br />
TRIVAC D 65 BCS<br />
TRIVAC D 65 BCS<br />
Run-up time<br />
forevacuum flange<br />
Purge / vent port<br />
Cooling water connection<br />
(OD of tube)<br />
Weight, approx.<br />
min<br />
DN<br />
VCR nut<br />
mm (in.)<br />
kg (lbs)<br />
< 6 < 6<br />
40 KF 40 KF<br />
1/4" 1/4"<br />
6.4 (0.25) 6.4 (0.25)<br />
32 (70) 32 (70)<br />
10000<br />
I x s -1 N 2<br />
1000<br />
Pumping Speed<br />
100<br />
10<br />
8<br />
6<br />
4<br />
He<br />
H 2<br />
2<br />
1<br />
10 -4<br />
2 4 6 8<br />
10 -3 10 -2 10 -1 mbar<br />
Inlet Pressure<br />
10<br />
Pumping speed of the <strong>TURBOVAC</strong> <strong>MAG</strong> 1500 C/CT as a function of the inlet pressure<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
77 C09
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