Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension<br />
with Compound Stage<br />
Ordering Information<br />
Inlet flange<br />
<strong>TURBOVAC</strong> <strong>MAG</strong> turbomolecular pump<br />
Electronic frequency converter<br />
<strong>MAG</strong>.DRIVE digital<br />
<strong>MAG</strong>.DRIVE digital<br />
with Profibus interface<br />
Plug-in control<br />
Purge gas valve<br />
Connecting cable converter – pump 1)<br />
01.5 m (5.25 ft) DRIVE/BEARING<br />
03.0 m (10.5 ft) DRIVE/BEARING<br />
05.0 m (17.5 ft) DRIVE/BEARING<br />
10.0 m (35.0 ft) DRIVE/BEARING<br />
20.0 m (70.0 ft) DRIVE/BEARING<br />
Connecting cable for purge gas valve<br />
01.5 m (5.25 ft) pump/coverter<br />
03.0 m (10.5 ft) pump/coverter<br />
10.0 m (35.0 ft) pump/coverter<br />
DN<br />
<strong>TURBOVAC</strong> <strong>MAG</strong><br />
W 830 W 830 C W 1300 W 1300 C<br />
160 CF 160 ISO-F 200 CF 200 ISO-F 250 ISO-F<br />
Part No. Part No. Part No. Part No. Part No.<br />
400100V0041 400100V0005 400110V0051 400110V0011 400110V0021<br />
Part No. Part No. Part No. Part No. Part No.<br />
400035V0011 400035V0011 400035V0011 400035V0011 400035V0011<br />
400035V0013 400035V0013 400035V0013 400035V0013 400035V0013<br />
Part No. Part No. Part No. Part No. Part No.<br />
121 36 121 36 121 36 121 36 121 36<br />
Part No. Part No. Part No. Part No. Part No.<br />
121 33 121 33 121 33 121 33 121 33<br />
Part No. Part No. Part No. Part No. Part No.<br />
400036V0001 400036V0001 400036V0001 400036V0001 400036V0001<br />
Part No. Part No. Part No. Part No. Part No.<br />
400036V0006 400036V0006 400036V0006 400036V0006 400036V0006<br />
Part No. Part No. Part No. Part No. Part No.<br />
400036V0004 400036V0004 400036V0004 400036V0004 400036V0004<br />
Part No. Part No. Part No. Part No. Part No.<br />
400036V0002 400036V0002 400036V0002 400036V0002 400036V0002<br />
Part No. Part No. Part No. Part No. Part No.<br />
400036V0003 400036V0003 400036V0003 400036V0003 400036V0003<br />
Part No. Part No. Part No. Part No. Part No.<br />
400038V0001 400038V0001 400038V0001 400038V0001 400038V0001<br />
Part No. Part No. Part No. Part No. Part No.<br />
400038V0006 400038V0006 400038V0006 400038V0006 400038V0006<br />
Part No. Part No. Part No. Part No. Part No.<br />
400038V0002 400038V0002 400038V0002 400038V0002 400038V0002<br />
1) further connecting cables can be found under <strong>MAG</strong>.DRIVE digital in the section “<strong>Turbomolecular</strong> <strong>Pumps</strong> with Magnetic Rotor Suspension”,<br />
para. “Frequency Converters”<br />
C09 84 Oerlikon Leybold Vacuum Full Line Catalog
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