Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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Technical Data <strong>TURBOVAC</strong> TW 1600<br />
Inlet flange<br />
DN<br />
200 ISO-F 250 ISO-F • 250 CF<br />
Pumping speed<br />
N 2 I x s -1<br />
Ar I x s -1<br />
Max. gas throughput<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
1000 1420<br />
820 1200<br />
7.4 7.4<br />
6.8 6.8<br />
Compression ratio k 0<br />
for O-ring sealed pumps<br />
N 2<br />
Ar<br />
1 x 10 7 1 x 10 7<br />
3 x 10 8 3 x 10 8<br />
Ultimate pressure<br />
Max. foreline pressure for N 2<br />
mbar (Torr)<br />
mbar (Torr)<br />
< 3 x 10 -10 (< 2.25 x 10 -10 ) < 3 x 10 -10 (< 2.25 x 10 -10 )<br />
8 (6) 8 (6)<br />
Recommended forevacuum pump<br />
(alternatively)<br />
Run-up time to 95% speed<br />
Purge / vent port<br />
Cooling water connection<br />
Weight, approx.<br />
Supply voltage<br />
Max. power consumption<br />
min<br />
DN<br />
kg (lbs)<br />
V AC<br />
W<br />
TRIVAC D 65 B + RUVAC WA 501 TRIVAC D 65 B + RUVAC WA 501<br />
DIVAC 4.8 VT<br />
DIVAC 4.8 VT<br />
SOGEVAC SV 25 SOGEVAC SV 25<br />
SCROLLVAC SC 30 D<br />
SCROLLVAC SC 30 D<br />
< 10 < 10<br />
G 1/4" G 1/4"<br />
G 3/8" G 3/8"<br />
40 (88.3) 40 (88.3)<br />
100 - 240 100 - 240<br />
700 700<br />
Ordering Information<br />
<strong>TURBOVAC</strong> TW 1600<br />
Inlet flange Foreline flange Cooling method Interface<br />
DN 200 ISO-F DN 40 KF Water-cooled Profibus<br />
DN 250 ISO-F DN 40 KF Water-cooled Profibus<br />
DN 250 CF DN 40 KF Water-cooled Profibus<br />
Purge filter<br />
Accessories for serial interfaces RS 232 C <strong>and</strong> RS 485 C<br />
Part No. 800041V2144<br />
Part No. 800041V2444<br />
Part No. 800041V2844<br />
Part No. 200 18 515<br />
see chapter “<strong>Turbomolecular</strong> <strong>Pumps</strong>“,<br />
para. “Accessories“<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
61<br />
C09
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