Turbomolecular Pumps TURBOVAC and MAG - Granzow

TURBOVAC 1100 C
ClassicLine
Typical Applications
- Data storage
- Flat panel displays
- Optical coating
- Large area coating
- R & D, e.g.
- Fusion experiments
- Space simulation
- Load locks and transfer chambers
DN
A
Top view
E
45°
h 1 a
h 2 (C)
C
h
ød
D h 6 h 5
F
B
B
E 45°
45°
h 3
E
h 4
D
F
a 1
DN h h 1 h 2 h 3 h 4 h 5 h 6 a a 1 b d
160 ISO-K mm 341 230 247 111 94 63 28.5 133 153 141 258
in. 13.43 9.06 9.72 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16
200 ISO-K mm 325 214 231 111 94 63 28.5 133 153 141 258
in. 12.80 8.43 9.09 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16
250 ISO-K mm 310 200 217 111 94 63 28.5 133 153 141 258
in. 12.20 7.87 8.54 4.37 3.70 2.48 1.12 5.24 6.02 5.55 10.16
b
Technical Features
- Robust rotor design
- Operation in any orientation
- Highest pumping speed and
throughput
- Integrated control system for
monitoring the temperature of the
bearings
- Oil-free pump for generating clean
high and ultrahigh vacuum
conditions
Dimensional drawing for the TURBOVAC 1100 C
10 4 10 -5 10 -4 10 -3 10 -2 10 -1 Torr
10 3
750
Advantages to the User
- Space-saving
- Easy to integrate into complex
vacuum systems
- High productivity
I x s -1 10 1
Pumping Speed
10 2
8
6
4
2
10 0
10 -5 2 4 6 8
10 -4 10 -3
10 -2 10 -1 mbar
10
N2
Inlet Pressure
Ar
H2
- Low operating costs
- Highly reliable operation also in
processes loaded with particles
Pumping speed as a function of the inlet pressure (TURBOVAC 1100 C with flange DN 250)
C09 34
Oerlikon Leybold Vacuum Full Line Catalog