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Turbomolecular Pumps TURBOVAC and MAG - Granzow

Turbomolecular Pumps TURBOVAC and MAG - Granzow

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<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical Rotor Suspension<br />

without Compound Stage<br />

Ordering Information <strong>TURBOVAC</strong> 50<br />

Inlet flange Foreline flange Cooling method Interface<br />

DN 40 KF DN 16 KF Convection –<br />

DN 40 CF DN 16 KF Convection –<br />

DN 63 ISO-K DN 16 KF Convection –<br />

DN 63 CF DN 16 KF Convection –<br />

Part No. 854 00<br />

Part No. 853 99<br />

Part No. 854 01<br />

Part No. 854 02<br />

Accessories, necessary for all pumps<br />

Electronic frequency converter NT 10<br />

090 - 140 V<br />

180 - 260 V<br />

Connecting cable NT 10 - pump<br />

3 m (10.5 ft)<br />

5 m (17.5 ft)<br />

Part No. 859 01<br />

Part No. 859 00<br />

Part No. 121 08<br />

Part No. 121 09<br />

Accessories, optional<br />

Air cooling unit<br />

230 V AC<br />

110 V AC<br />

100 V AC<br />

Water cooling kit<br />

Flange heater<br />

63 CF, 230 V, 50 Hz<br />

63 CF, 110 V, 60 Hz<br />

Vibration absorber<br />

DN 63 ISO-K<br />

DN 63 CF<br />

Part No. 854 05<br />

Part No. 854 06<br />

Part No. 800152V0015<br />

Part No. 854 08<br />

Part No. 854 04<br />

Part No. 854 07<br />

Part No. 800131V0063<br />

Part No. 500 070<br />

C09 16 Oerlikon Leybold Vacuum Full Line Catalog

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