Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
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Technical Data <strong>TURBOVAC</strong> T 1600 / T 1601<br />
Inlet flange<br />
DN<br />
Pumping speed<br />
N 2 I x s -1<br />
Ar I x s -1<br />
He I x s -1<br />
H 2 I x s -1<br />
Max. gas throughput<br />
N 2 mbar x I x s -1<br />
Ar mbar x I x s -1<br />
He mbar x I x s -1<br />
H 2 mbar x I x s -1<br />
Compression ratio<br />
N 2<br />
Ar<br />
He<br />
H 2<br />
Ultimate pressure<br />
mbar (Torr)<br />
Max. foreline pressure for N 2 mbar (Torr)<br />
Recommended forevacuum pump<br />
(alternatively)<br />
Run-up time to 95% speed<br />
Purge / vent port<br />
Cooling water connection<br />
Weight, approx.<br />
Supply voltage<br />
Max. power consumption<br />
min<br />
DN<br />
kg (lbs)<br />
V<br />
VA<br />
200 ISO-F 250 ISO-F • 250 CF<br />
1100 1550<br />
960 1410<br />
1150 1300<br />
690 720<br />
30 30<br />
20 20<br />
30 30<br />
20 20<br />
5 x 10 5 5 x 10 5<br />
1 x 10 6 1 x 10 6<br />
1 x 10 4 1 x 10 4<br />
2 x 10 2 2 x 10 2<br />
< 3 x 10 -10 (< 2.2 x 10 -10 ) < 3 x 10 -10 (< 2.2 x 10 -10 )<br />
0.5 (0.375) 0.5 (0.375)<br />
TRIVAC D 65 B + RUVAC WA 501 TRIVAC D 65 B + RUVAC WA 501<br />
TRIVAC D 65 B<br />
TRIVAC D 65 B<br />
SCROLLVAC SC 15/30 D<br />
SCROLLVAC SC 15/30 D<br />
< 10 < 10<br />
G 1/4" G 1/4"<br />
G 3/8" G 3/8"<br />
40 (88) 40 (88)<br />
100 - 240 100 - 240<br />
700 700<br />
Ordering Information<br />
<strong>TURBOVAC</strong> T 1600<br />
Inlet flange Foreline flange Cooling method Interface<br />
DN 200 ISO-F DN 40 KF Water-cooled –<br />
DN 200 ISO-F DN 40 KF Water-cooled Profibus<br />
DN 250 ISO-F DN 40 KF Water-cooled –<br />
DN 250 ISO-F DN 40 KF Water-cooled Profibus<br />
DN 250 ISO-F DN 63 ISO-K Water-cooled –<br />
DN 250 CF DN 40 KF Water-cooled –<br />
Purge filter<br />
Accessories for RS 232 C <strong>and</strong> RS 485 C interfaces<br />
Part No. 800040V1144<br />
Part No. 800040V2144<br />
Part No. 800040V1444<br />
Part No. 800040V2444<br />
Part No. 800040V1544<br />
Part No. 800040V1844<br />
Part No. 200 18 515<br />
see chapter “<strong>Turbomolecular</strong> <strong>Pumps</strong>”,<br />
para. “Accessories”<br />
Ordering Information<br />
Inlet flange Foreline flange Cooling method Interface<br />
DN 250 ISO-F DN 40 KF Water-cooled Profibus<br />
Accessories for RS 232 C <strong>and</strong> RS 485 C interfaces<br />
<strong>TURBOVAC</strong> T 1601<br />
Part No. 800040V4444<br />
see chapter “<strong>Turbomolecular</strong> <strong>Pumps</strong>”,<br />
para. “Accessories”<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
39<br />
C09
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