Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Turbomolecular Pumps TURBOVAC and MAG - Granzow
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
<strong>Turbomolecular</strong> <strong>Pumps</strong> with Mechanical Rotor Suspension<br />
with Compound Stage<br />
<strong>TURBOVAC</strong> TW 300 H<br />
Typical Applications<br />
- Mass spectrometers<br />
- R & D, e.g.<br />
- UHV systems<br />
- Particle accelerators<br />
- Load locks <strong>and</strong> transfer chambers<br />
Ø a 2<br />
Ø a 1<br />
DN<br />
Top view<br />
Technical Features<br />
- Integrated frequency converter<br />
- Compact design<br />
- Operation in any orientation<br />
h<br />
h 1<br />
- High pumping speed <strong>and</strong><br />
compression for light gases<br />
l<br />
b<br />
h 3<br />
b 1<br />
h 2<br />
a<br />
- Highly effective air-cooling unit<br />
- Oil-free pump for generating clean<br />
high <strong>and</strong> ultrahigh vacuum<br />
conditions<br />
DN a a 1 a 2 h h 1 h 2 h 3 b b 1 l<br />
100 ISO-K mm 160 130 171 217 243 50 55 154 77 186<br />
in. 6.30 5.12 6.73 8.54 9.57 1.97 2.17 6.06 3.03 7.32<br />
100 CF mm 160 151.5 – 219.4 – 50 55 154 77 186<br />
in. 6.30 5.96 – 8.64 – 1.97 2.17 6.06 3.03 7.32<br />
Dimensional drawing for the <strong>TURBOVAC</strong> TW 300 H<br />
Pumping Speed<br />
10 3<br />
10 2<br />
8<br />
6<br />
4<br />
10 -5 10 -4 10 -3 10 -2 10 -1 10 0 Torr 750<br />
N 2 , Ar<br />
He<br />
H 2<br />
Advantages to the User<br />
- Space-saving<br />
- Easy to integrate into complex<br />
vacuum systems<br />
- High foreline tolerance allows the<br />
use of down-sized forevacuum<br />
pumps<br />
- Low operating costs<br />
I x s -1 2 8<br />
2<br />
10 1<br />
4 6<br />
10 -5 10 -4 10 -3 10 -2 10 -1 10 0 mbar 10 1<br />
Inlet Pressure<br />
Pumping speed as a function of the inlet pressure<br />
C09 52 Oerlikon Leybold Vacuum Full Line Catalog
Change language